Structural and optoelectronic properties of indium doped SnO2 thin films deposited by sol gel technique

Synergistic Influence of the Deposition Method, Postdeposition Annealing, and Textured Substrates on the Properties of ITO Thin Films

“…The RF sputtering process has an approximately 3-fold lower deposition rate (20 nm/min) compared to DC sputtering (60 nm/min) for an equivalent power density of 50 W as observed in this work. The slower deposition rate of RF sputtering leads to better crystalline properties of ITO films compared to the DC-sputtered films. , The improvement in crystallinity is known to result in the reduction of lattice defects such as strain and dislocation density, which are regarded as scattering centers. , Hence, the RF-deposited ITO thin films have shown improved transmittance compared to DC-sputtered films.…”

“…44-1087). The absence of Sn, SnO, and SnO 2 characteristic peaks in all the spectra can be attributed to the complete miscibility of Sn atoms in the In 2 O 3 lattice …”

“…All the as-deposited DC-sputtered thin films in Figure 5a exhibited broader and lower intensity peaks, particularly between 20°and 40°, suggesting the amorphous phase nature. 28 However, other peaks at around 29°, 34°, 49°, 29 The difference in preferential orientation of (222) in DCsputtered ITO and (400) in RF-sputtered ITO was due to the bombardment of higher energetic particles in RF sputtering. In addition, the kinetic energy of the RF-sputtered atoms and their lower deposition rate enhance the surface migration that favors the formation of ITO thin films with improved crystallinity, 10 which is evident by their comparatively sharp and narrow peaks as shown in Figure 5c,d.…”

“…10,37 The improvement in crystallinity is known to result in the reduction of lattice defects such as strain and dislocation density, which are regarded as scattering centers. 29,38 Hence, the RF-deposited ITO thin films have shown improved transmittance compared to DC-sputtered films.…”

Development of Thick Superhydrophilic TiO2–ZrO2 Transparent Coatings Realized through the Inclusion of Poly(methyl methacrylate) and Pluronic-F127

“…The kurtosis value greater than 3 implies that surface height distribution is not Gaussian-like, which implies relatively spiky surfaces. 37,38 Comparing the skewness and kurtosis value of both surfaces, it is obvious that the TZPPF surface is more spiky with dominant peaks compared to the TZP surface. Thus, the FESEM and AFM studies together confirm the bimodal porous structure of the TZPPF film.…”