2003
DOI: 10.1016/s0257-8972(03)00417-1
|View full text |Cite
|
Sign up to set email alerts
|

Structural and optical studies of ZnO thin films deposited by r.f. magnetron sputtering: influence of annealing

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1

Citation Types

3
39
0

Year Published

2004
2004
2018
2018

Publication Types

Select...
7
2

Relationship

1
8

Authors

Journals

citations
Cited by 85 publications
(42 citation statements)
references
References 21 publications
3
39
0
Order By: Relevance
“…It can be seen in figure 5 a good agreement between experimental and calculated curves of tan (Ψ) and cos(Δ) along the spectral range varying from 0.6 eV to 5.5 eV. This confirms the choice of the Cauchy formalism as a theoretical model for the study of optical and electrical properties of ZnO thin films by ellipsometry [22,23,24]. Moreover, the thickness and porosity of ZnO thin layers are about 163 nm and 13% respectively achieved by adjusting the theoretical values to the experimental results.…”
Section: Ellipsometry Investigationssupporting
confidence: 64%
“…It can be seen in figure 5 a good agreement between experimental and calculated curves of tan (Ψ) and cos(Δ) along the spectral range varying from 0.6 eV to 5.5 eV. This confirms the choice of the Cauchy formalism as a theoretical model for the study of optical and electrical properties of ZnO thin films by ellipsometry [22,23,24]. Moreover, the thickness and porosity of ZnO thin layers are about 163 nm and 13% respectively achieved by adjusting the theoretical values to the experimental results.…”
Section: Ellipsometry Investigationssupporting
confidence: 64%
“…magnetron reactive sputtered ZnO film (a thickness of ~800 nm) fabricated under the sputtering conditions of a working pressure of 1 Pa, a r.f. power density of 0.89 Wcm -2 , Ar-O 2 ratio 95: 5, and the substrate temperature of room temperature (RT) were 1.89 and 0.93, respectively, and they could be enhanced to 1.91 and 0.94 by further annealing at 400 °C/1 h (Moustaghfir et al, 2003). Additionally, an earlier study of the r.f.…”
Section: Refractive Index and Packing Densitymentioning
confidence: 95%
“…ZnO has also being widely used as an additive in numerous materials and products including plastics, ceramics, glass, cement, lubricants, paints, ointments, adhesives, sealants, pigments, foods (source of Zn nutrient), batteries, ferrites, fire retardants and first aid tapes. Thin films of Zinc oxide can be prepared by various techniques; among them are Sputtering [2], Chemical Vapor Deposition (CVD) [3], Laser ablation [4], Sol-gel [5] [6], Spray pyrolysis [7]. The sol-gel spin coating has advantages such as easy control of chemical composition, ability to produce fine structure and fabrication of thin film at low cost.…”
Section: Introductionmentioning
confidence: 99%
“…The values of E g change with spin coating speed which show in Figure 5. The corresponding optical band gap of ZnO thin film was estimated by extrapolation of the linear relationship between (αhυ) 2 and hυ according to the Equation (4).…”
mentioning
confidence: 99%