Structural and optical properties of a-Si1−xCx:H films synthesized by dc magnetron sputtering technique

Comparative study of porous amorphous a-Si1−xCx films and a-Si1−xCx membranes on structural and luminescence properties

“…PSC samples are prepared by electrochemical etching of p-type a-Si 1 À x C x that deposited on p-type Si single crystals, which are grown by DC magnetron co-sputtering of p-type 6H-SiC polycrystalline and p-type Si single crystal [25]. The grown-in nitrogen concentration is about 10 18 cm À 3 .…”

Photoluminescence in silicon/silicon oxide films produced by the Pulsed Electron Beam Ablation technique

“…The challenge to use silicon as an emitter device is to produce tunable PL in the entire visible range [3]. Several techniques have been employed to obtain silicon nanoparticles, such as sputtering [4][5][6], evaporation [7,8], PECVD [2,9], ionic implantation [10], among others. In general, these techniques produce a silicon-rich material by deposition or growth followed by annealing at high temperature to form silicon nanoparticles [2].…”

Photoluminescence of silicone oil treated by fluorocarbon plasma

“…[1−10] Carbon-incorporated silicon oxide is one of the promising candidates, because its photoluminescence (PL) covers the visible spectral range of 350-800 nm. [1] Recently, various carbon-incorporated silicon oxide light emitting materials have been developed, including amorphous Si:C:O:H films, [2] amorphous silicon oxycarbide (a-SiC x O y ) films, [3−4] hydrogenated amorphous silicon carbide (a-SiC:H) films, [5,6] and silicon-incorporated diamond-like carbon films. [7] These films are usually fabricated via thermal vapor deposition, [3] reactive dc-magnetron sputtering, [2,6] melt-spinning, [4] and plasma enhanced chemical vapor deposition (PECVD).…”

“…[1] Recently, various carbon-incorporated silicon oxide light emitting materials have been developed, including amorphous Si:C:O:H films, [2] amorphous silicon oxycarbide (a-SiC x O y ) films, [3−4] hydrogenated amorphous silicon carbide (a-SiC:H) films, [5,6] and silicon-incorporated diamond-like carbon films. [7] These films are usually fabricated via thermal vapor deposition, [3] reactive dc-magnetron sputtering, [2,6] melt-spinning, [4] and plasma enhanced chemical vapor deposition (PECVD). [5,7] Silicone oil is also a kind of carbon-incorporated silicon oxide material.…”

“…Recent investigations on the light emission in carbon-incorporated silicon oxide materials showed that the bonds, the defects, the nanoparticles, and the clusters in the films were possible factors related to photoluminescence characteristics. [2,3,6,7] In our previous work, we have found that the bonding configurations of the silicone oil can be changed directly by Ar plasma treatment. [11] If we use the fluorocarbon plasma to treat the silicone oil and modify its bonding configurations, photoluminescence from the post-treated silicone oil may be achieved.…”