Structural and optical properties of diamond and nano-diamond films grown by microwave plasma chemical vapor deposition

Sharda, T.; Rahaman, Md. Mizanur; Nukaya, Y.; Soga, Tetsuo; Jimbo, Takashi; Umeno, Masayoshi

doi:10.1016/s0925-9635(00)00390-3

Cited by 103 publications

(43 citation statements)

References 26 publications

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“…As the grain size of the crystalline component decreases, the scattering intensity of the amorphous carbon bands increases. 5 Two additional peaks appear in the Raman spectrum of the UNCD films compare to that of MCD at 1150 and 1480 cm −1 ͓Fig. 1͑a͔͒, which nowadays are used as fingerprints of UNCD films.…”

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confidence: 99%

Grain boundary fine structure of ultrananocrystalline diamond thin films measured by Raman scattering

Vereš

Tóth

Koós

2007

Applied Physics Letters

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Structural units of the grain boundaries in ultrananocrystalline diamond thin films with different grain sizes were investigated using Raman spectroscopy. Characteristic peaks of well-defined molecular structural building blocks were detected in the near-infrared excited Raman spectra of these materials by limiting the excitation volume to the size of the crystallites using an optical microscope and surface enhanced Raman spectroscopy. The analysis of the spectra provides evidence for the presence of aromatic hydrocarbons and different sp3 CHx groups in grain boundaries of these materials.

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confidence: 99%

Grain boundary fine structure of ultrananocrystalline diamond thin films measured by Raman scattering

Vereš

Tóth

Koós

2007

Applied Physics Letters

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“…A CH 4 /H 2 mixture, in which the CH 4 content ([CH 4 ]) is usually less than 5%, leads to mm-size polycrystalline diamond films. One method of synthesizing nanocrystalline diamond films is to increase [CH 4 ] to up to 10% while the substrate temperature is kept constant [11][12][13]. The resultant morphology changes from faceted microcrystals to spherical nanocrystals.…”

Section: Conventional Microwave Pe-cvdmentioning

confidence: 99%

Plasma-enhanced chemical vapor deposition of nanocrystalline diamond

Okada¹

2007

Science and Technology of Advanced Materials

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Nanocrystalline diamond films have attracted considerable attention because they have a low coefficient of friction and a low electron emission threshold voltage. In this paper, the author reviews the plasma-enhanced chemical vapor deposition (PE-CVD) of nanocrystalline diamond and mainly focuses on the growth of nanocrystalline diamond by low-pressure PE-CVD. Nanocrystalline diamond particles of 200-700 nm diameter have been prepared in a 13.56 MHz low-pressure inductively coupled CH 4 /CO/H 2 plasma. The bonding state of carbon atoms was investigated by ultraviolet-excited Raman spectroscopy. Electron energy loss spectroscopy identified sp 2 -bonded carbons around the 20-50 nm subgrains of nanocrystalline diamond particles. Plasma diagnostics using a Langmuir probe and the comparison with plasma simulation are also reviewed. The electron energy distribution functions are discussed by considering different inelastic interaction channels between electrons and heavy particles in a molecular CH 4 /H 2 plasma. r

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“…The diamond, as another kind of carbon material, was suggested that has excellent optical properties [5] .…”

Section: Introductionmentioning

confidence: 99%

Passive mode-locking of fiber laser based on diamond thin film

Wan

Jiang

et al. 2012

IEEE Photonics Conference 2012

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Structural and optical properties of diamond and nano-diamond films grown by microwave plasma chemical vapor deposition

Cited by 103 publications

References 26 publications

Grain boundary fine structure of ultrananocrystalline diamond thin films measured by Raman scattering

Grain boundary fine structure of ultrananocrystalline diamond thin films measured by Raman scattering

Plasma-enhanced chemical vapor deposition of nanocrystalline diamond

Passive mode-locking of fiber laser based on diamond thin film

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