For methylammonium lead iodide perovskite solar cells prepared by co-evaporation, power conversion efficiencies of over 20% have been already demonstrated, however, so far only in n-i-p configuration. Currently, the overall major challenges are the complex evaporation characteristics of organic precursors that strongly depend on the underlying charge selective contacts and the insufficient reproducibility of the co-evaporation process. To ensure a reliable co-evaporation process, it is important to identify the impact of different parameters in order to develop a more detailed understanding. In this work, we study the influence of substrate temperature, underlying hole transporting material (polymer PTAA versus self-assembling monolayer molecule MeO-2PACz) and perovskite precursor ratio on the morphology, composition and performance of co-evaporated p-i-n perovskite solar cells. We first analyse the evaporation of pure precursor materials and show that the adhesion of methylammonium iodide (MAI) is significantly reduced with increased substrate temperature, while it remains almost unaffected for lead iodide (PbI2). This substrate temperature-dependent evaporation behaviour of MAI is also transferred to the co-evaporation process and can directly influence the perovskite composition. We demonstrate that the optimal substrate temperature window for perovskite deposition is close to room temperature. At high temperature not enough MAI for precise stoichiometry is incorporated even with very high MAI rates While at temperatures below -25 °C the conversion of MAI with PbI2 is inhibit and an amorphous yet unreacted film is formed. We observe that perovskite composition and morphology vary widely between the organic hole-transport layer (HTLs) PTAA and MeO-2PACz. For all substrate temperatures MeO-2PACz enables higher solar cell PCEs than PTAA. Through the combination of vapourdeposited perovskites and self-assembled monolayer, we achieve a stabilised power conversion efficiency of 20.6 %, which is the first reported PCE above 20% for evaporated perovskite solar cells in p-i-n architecture.