Structural and optical properties of boron-doped amorphous carbon nitride thin films synthesized by microwave electron cyclotron resonance-plasma chemical vapor deposition

Sawahata, Junji; Teramoto, Michihito; Nakamura, Shigeyuki; Kametomo, Kenta; Satake, Masaki; Yamamoto, Shinichi; Itoh, Kunio; Takarabe, Kenichi

doi:10.7567/jjap.53.071002

Cited by 3 publications

(2 citation statements)

References 29 publications

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“…The highest BE band position matches precisely with that of the sp 2 -hybridized CN bonds, for instance, as reported for CN and BCN layers. 32,47 This supports the previous attribution of the FTIR band at 1660 cm −1 . The observation of the CN bond (and its attribution to a separate double-bonded entity), however, does not so far exclude the possibility of carbon being chemically bonded to the GaN crystals, although no evidence for the latter was found from the FTIR.…”

Section: Resultssupporting

confidence: 91%

Composite GaN–C–Ga (“GaCN”) Layers with Tunable Refractive Index

et al. 2018

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This article describes novel composite thin films consisting of GaN, C, and Ga (termed “GaCN”, as an analogue to BCN and other carbonitrides) as a prospective material for future optical applications. This is due to their tunable refractive index that depends on the carbon content. The composites are prepared by introducing alternating pulses of trimethylgallium (TMG) and ammonia (NH3) on silicon substrates to mimic an atomic layer deposition process. Because the GaCN material is hardly reported to the best of our knowledge, a comprehensive characterization is performed to investigate into its chemical nature, primarily to determine whether or not it exists as a single-phase material. It is revealed that GaCN is a composite, consisting of phase-segregated, nanoscale clusters of wurtzitic GaN polycrystals, in addition to inclusions of carbon, nitrogen, and gallium, which are chemically bonded into several forms, but not belonging to the GaN crystals itself. By varying the deposition temperature between 400 and 600 °C and the NH3 partial pressure between 0.7 × 10–3 and 7.25 mbar, layers with a wide compositional range of Ga, C, and N are prepared. The role of carbon on the GaCN optical properties is significant: an increase of the refractive index from 2.19 at 1500 nm (for carbon-free polycrystalline GaN) to 2.46 (for GaCN) is achieved by merely 10 at. % of carbon addition. The presence of sp2-hybridized C=N clusters and carbon at the interface of the GaN polycrystals are proposed to determine their optical properties. Furthermore, the formation of the GaN polycrystals in the composite occurs through a TMG:NH3 surface-adduct assisted pathway, whereas the inclusions of carbon, nitrogen, and gallium are formed by the thermal decomposition of the chemisorbed TMG species.

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Section: Resultssupporting

confidence: 91%

Composite GaN–C–Ga (“GaCN”) Layers with Tunable Refractive Index

et al. 2018

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“…The characteristic of HFCVD is that the catalytic role of the metallic substrate in decomposing the hydrocarbon precursors is taken over here by the heated filament that promotes the dissociation of gas carbon source and therefore the graphene films grown directly on glass at reduced temperatures could be achieved. Compared with PECVD and ECRCVD, HFCVD has some unique merits, including high deposition rate, easily handled substrate, and no damaging bombardment of energetic ions. , Although the decomposition ability problems can be resolved by either the filament in HFCVD or the plasma in PECVD and ECRCVD, it has been discovered that the films deposited on glass at reduced substrate temperatures by these methods still remain amorphous. − …”

Section: Introductionmentioning

confidence: 99%

Evolution of Structural and Electrical Properties of Carbon Films from Amorphous Carbon to Nanocrystalline Graphene on Quartz Glass by HFCVD

Zhai

Shen

Chen

et al. 2018

ACS Appl. Mater. Interfaces

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Direct growth of graphene films on glass is of great importance but has so far met with limited success. The noncatalytic property of glass results in the low decomposition ability of hydrocarbon precursors, especially at reduced temperatures (<1000 °C), and therefore amorphous carbon (a-C) films are more likely to be obtained. Here, we report the hydrogen influence on the structural and electrical properties of carbon films deposited on quartz glass at 850 °C by hot-filament chemical vapor deposition (HFCVD). The results revealed that the obtained a-C films were all graphitelike carbon films. Structural transition of the deposited films from a-C to nanocrystalline graphene was achieved by raising the hydrogen dilution ratios from 10 to over 80%. On the basis of systematic structural and chemical characterizations, a schematic process with three steps including sp chain aggregation, aromatic ring formation, and sp bond etching was proposed to interpret the structural evolution. The nanocrystalline graphene films grown on glass by HFCVD exhibited good electrical performance with a carrier mobility of 36.76 cm/(V s) and a resistivity of 5.24 × 10 Ω cm over an area of 1 cm. Temperature-dependent electrical characterizations revealed that the electronic transport in carbon films was dominated by defect, localized, and extended states, respectively, when increasing the temperature from 75 to 292 K. The nanocrystalline graphene films presented higher carrier mobility and lower carrier concentration than those of a-C films, which was mainly attributed to their smaller conductive activation energy. The present investigation provides an effective way for direct growth of graphene films on glass at reduced temperatures and also offers useful insights into the understanding of structural and electrical relationship between a-C and graphene.

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Nanostructure and optical property tuning between the graphitic-like CNx and fullerene-like β-C3N4 via Fe doping and substrate temperature

Xiong

Cao

2019

Journal of Alloys and Compounds

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Structural and optical properties of boron-doped amorphous carbon nitride thin films synthesized by microwave electron cyclotron resonance-plasma chemical vapor deposition

Cited by 3 publications

References 29 publications

Composite GaN–C–Ga (“GaCN”) Layers with Tunable Refractive Index

Composite GaN–C–Ga (“GaCN”) Layers with Tunable Refractive Index

Evolution of Structural and Electrical Properties of Carbon Films from Amorphous Carbon to Nanocrystalline Graphene on Quartz Glass by HFCVD

Nanostructure and optical property tuning between the graphitic-like CNx and fullerene-like β-C3N4 via Fe doping and substrate temperature

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