Structural and morphological characterization of Al2O3 coated macro-porous silicon by atomic layer deposition

Sridhar, Seetharaman; Maydannik, Philipp; Ivanova, Tatiana; Homola, Tomáš; Sillanpää, Mika; Rameshbabu, N.; Alagan, Viswanathan

doi:10.1016/j.tsf.2016.09.026

Cited by 16 publications

(11 citation statements)

References 25 publications

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“…The measured band gap energy of Al 2 O 3 is lower than the reported value of Al 2 O 3 (8.8 eV) [17], which is consistent with the results shown in [16,18]. This may be attributed to the defect structure of Al 2 O 3 and required further investigation [16][17][18]. The nano-structured Al 2 O 3 film introduces a new trap band which is helpful for the charge inhibition.…”

Section: Advances In Engineering Research Volume 146supporting

confidence: 85%

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Structure and Space Charge Inhibition Performance of Reactive RF Magnetron Sputter Deposited Al2O3 Thin Film on the Fiber Surface

Hao¹,

Li²,

Liao³

et al. 2018

Proceedings of the 4th Annual International Conference on Material Engineering and Application (ICMEA 2017)

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Abstract-Cellulose insulation paper/pressboard has been widely used in HVDC transformers. In this study, the aluminum oxide function film was deposited on the cellulose insulation pressboard surface using reactive radio frequency (RF) magnetron sputtering. The sputtered thin film was characterized by the scanning electron microscopy (SEM) and the X-ray photoelectron spectroscopy (XPS). The influence of the deposited function film on the space charge injection/accumulation behavior was investigated. SEM and XPS results show that the nano-structured Al 2 O 3 film was successfully fabricated on the fiber surface. The oil impregnated sputtered pressboard presents apparent space charge suppression effect. The obtained band gap energy (Eg) of Al 2 O 3 is 7.39 eV. The nano-structured Al 2 O 3 film introduces a new trap band which is helpful for the charge inhibition.

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Section: Advances In Engineering Research Volume 146supporting

confidence: 85%

“…The band gap energy (Eg) of Al 2 O 3 can be derived from the energy difference between elastic peak energy (E O1s) and onset of inelastic loss energy (E loss); Eg = E loss-E O1s [16][17][18]. As shown in Fig.6, The high resolution O 1s spectrum shows the energy of elastic peak (E O1s) is 532.08 eV.…”

Section: Advances In Engineering Research Volume 146mentioning

confidence: 99%

Structure and Space Charge Inhibition Performance of Reactive RF Magnetron Sputter Deposited Al2O3 Thin Film on the Fiber Surface

Hao¹,

Li²,

Liao³

et al. 2018

Proceedings of the 4th Annual International Conference on Material Engineering and Application (ICMEA 2017)

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“…E=530.5 and 532-533.5 eV, respectively. The O1s symmetric peak at 531.2 and 530.5 eV without any shoulder might arise from their growth procedures or conditions [24]. Figure 5 shows the top surface scanning electron microscope (SEM) image of TMO sputtered ARC films.…”

Section: Resultsmentioning

confidence: 99%

Increasing the silicon solar cell efficiency with transition metal oxide nano-thin films as anti-reflection coatings

Sagar

Rao²

2020

Mater. Res. Express

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Herein, we report the study on RF-sputtered transition metal oxide thin films of Zinc oxide, Magnesium oxide, and Aluminum oxide as an antireflection coating on silicon-based solar cells and their influence on energy conversion. The transmission spectrum of all sputtered metal oxides was studied using a UV-visible spectrophotometer. The phase formation and microstructure analysis of these sputtered oxides were studied using glass for the destructive test along with the device. The x-ray diffraction and cross-section scanning electron microscopy of sputtered glass confirmed a singlephase structure along with nearly equal desired deposition thickness. The thicknesses of sputtered films were estimated using variable angle ellipsometry and the same was confirmed from cross-section scanning electron micrograph. The chemical composition and oxidation state of thin films deposited on glass were established from x-ray photoemission spectroscopy. The ability of a fabricated device deposited with the antireflection layer in converting photon energy to electrical energy was studied using a solar simulator under 1 sun condition. The ability to collect charge carriers of the antireflection coated device as a function of wavelength was also studied using quantum efficiency measurement.

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“…Based on the above analysis, we can deduce that the Al 2 O 3 nano-structured film sputtered on the fibre surface could act as a functional barrier layer for charge injection. The band gap energy (Eg) of Al 2 O 3 can be derived from the energy difference between the elastic peak energy (E O1s) and the onset of inelastic loss energy (E loss): Eg = E loss − E O1s [ 41 , 54 , 55 ]. As shown in Figure 11 , the high resolution O 1s spectrum shows that the energy of the elastic peak (E O1s) is 532.08 eV.…”

Section: Discussionmentioning

confidence: 99%

Fabrication of Al2O3 Nano-Structure Functional Film on a Cellulose Insulation Polymer Surface and Its Space Charge Suppression Effect

Hao

Liao

et al. 2017

Polymers

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Cellulose insulation polymer (paper/pressboard) has been widely used in high voltage direct current (HVDC) transformers. One of the most challenging issues in the insulation material used for HVDC equipment is the space charge accumulation. Effective ways to suppress the space charge injection/accumulation in insulation material is currently a popular research topic. In this study, an aluminium oxide functional film was deposited on a cellulose insulation pressboard surface using reactive radio frequency (RF) magnetron sputtering. The sputtered thin film was characterized by the scanning electron microscopy/energy dispersive spectrometer (SEM/EDS), X-ray photoelectron spectroscopy (XPS), and X-ray diffraction (XRD). The influence of the deposited functional film on the dielectric properties and the space charge injection/accumulation behaviour was investigated. A preliminary exploration of the space charge suppression effect is discussed. SEM/EDS, XPS, and XRD results show that the nano-structured Al 2 O 3 film with amorphous phase was successfully fabricated onto the fibre surface. The cellulose insulation pressboard surface sputtered by Al 2 O 3 film has lower permittivity, conductivity, and dissipation factor values in the lower frequency (<10 3 Hz) region. The oil-impregnated sputtered pressboard presents an apparent space-charge suppression effect. Compared with the pressboard sputtered with Al 2 O 3 film for 90 min, the pressboard sputtered with Al 2 O 3 film for 60 min had a better space charge suppression effect. Ultra-small Al 2 O 3 particles (<10 nm) grew on the surface of the larger nanoparticles. The nano-structured Al 2 O 3 film sputtered on the fibre surface could act as a functional barrier layer for suppression of the charge injection and accumulation. This study offers a new perspective in favour of the application of insulation pressboard with a nano-structured function surface against space charge injection/accumulation in HVDC equipment.

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Structural and morphological characterization of Al2O3 coated macro-porous silicon by atomic layer deposition

Cited by 16 publications

References 25 publications

Structure and Space Charge Inhibition Performance of Reactive RF Magnetron Sputter Deposited Al2O3 Thin Film on the Fiber Surface

Structure and Space Charge Inhibition Performance of Reactive RF Magnetron Sputter Deposited Al2O3 Thin Film on the Fiber Surface

Increasing the silicon solar cell efficiency with transition metal oxide nano-thin films as anti-reflection coatings

Fabrication of Al2O3 Nano-Structure Functional Film on a Cellulose Insulation Polymer Surface and Its Space Charge Suppression Effect

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