2008
DOI: 10.1016/j.surfcoat.2007.09.035
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Structural and mechanical stability upon annealing of arc-deposited Ti–Zr–N coatings

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Cited by 53 publications
(23 citation statements)
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“…Transition-metal (TM) nitride refractory ceramics possess outstanding physical and mechanical properties, including extreme hardness [1][2][3], high toughness [4][5][6], thermal stability [7,8], chemical inertness [9,10], and good electrical conductivity [2,11], which renders them important for a large variety of applications ranging from wear-resistant protective coatings on tools employed in industrial machining [12,13] to diffusion barrier in electronic devices [14,15].…”
Section: Introductionmentioning
confidence: 99%
“…Transition-metal (TM) nitride refractory ceramics possess outstanding physical and mechanical properties, including extreme hardness [1][2][3], high toughness [4][5][6], thermal stability [7,8], chemical inertness [9,10], and good electrical conductivity [2,11], which renders them important for a large variety of applications ranging from wear-resistant protective coatings on tools employed in industrial machining [12,13] to diffusion barrier in electronic devices [14,15].…”
Section: Introductionmentioning
confidence: 99%
“…Due to excellent physical and mechanical properties, including high hardness [1][2][3] and toughness [4,5], chemical inertness [6], thermal stability [7], and good electrical conductivity [3], transition metal (TM) nitrides are widely applied as wear-resistant protective coatings for cutting tools [8] and engine components [9] and as diffusion barriers in electronic devices [10,11]. The properties and performances of TM nitride thin films depend on their micro-and nanostructure.…”
Section: Introductionmentioning
confidence: 99%
“…Generally they have higher hardness than their binary nitride components [71][72][73][74][75][76]. It has been shown that Ti 1−x X x N (X= Zr, Hf, V, Nb, Ta) can form solid solution over the whole x range (0 < x < 1) and are thermodynamically stable in the rocksalt structure [77,78].…”
Section: Ternary Pseudo-binary Nitride Alloysmentioning
confidence: 99%