2010
DOI: 10.1007/s11998-010-9287-9
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Structural and mechanical investigations of magnetron sputtering TiO2/Ti/TiN multilayer films on Si(100) substrate

Abstract: TiO 2 /Ti/TiN multicompositional coating was prepared by DC reactive magnetron sputtering (MS) at a temperature of 150°C using a combination of a Ti metal target and a pure Ar, an Ar-O 2 mixture, or an Ar-N 2 mixture discharge gas, onto a Silicon(100) substrate. This system represents nano-structured multilayer substrate model for biomedical application as well as substrate models to reproduce the bulk titanium surface. This substrate model (Ti/TiN/Si(100)) makes possible and easy mechanical and microscopic ch… Show more

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Cited by 8 publications
(5 citation statements)
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References 24 publications
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“…Compared to bare Ti substrate, TiN coating showed approximately eight times more corrosion resistance and 4 times more wear resistance [183]. For that reason, sputtered TiN was used as an interior layer between HAp films and pure Ti rendering the controllability of thin film structural properties because of the improvement in bonding, strong fatigue resistance and better mechanical performance of the HAp layer [184].…”
Section: Nitridesmentioning
confidence: 99%
“…Compared to bare Ti substrate, TiN coating showed approximately eight times more corrosion resistance and 4 times more wear resistance [183]. For that reason, sputtered TiN was used as an interior layer between HAp films and pure Ti rendering the controllability of thin film structural properties because of the improvement in bonding, strong fatigue resistance and better mechanical performance of the HAp layer [184].…”
Section: Nitridesmentioning
confidence: 99%
“…159 Furthermore, when TiN is used as an interlayer between HAp films and bulk Ti, the mechanical performances of HAp films are increased because of the improvment in bonding. 160 Moreover, PLD 161 and MS 160 allow producing thin TiN coatings with strong fatigue resistance as well as very strong adherence to the substrate. This results in mechanical properties (e.g., hardness, Young's modulus, stiffness and mechanical wear) similar to those of bone.…”
Section: Table III Some Advantages and Disadvantages Of Various Dry Coating Techniquesmentioning
confidence: 99%
“…The mechanical properties of individual layers in a multilayer structure are important for the functionality and performance of multilayer devices. To determine the depth profile of mechanical properties, the depth‐sensing technique is sometimes used to analyze multilayer films in the normal direction to the surface of film . However, in this case the nanoindentation measurements starting from the first surface layer are influenced by the layers below and the substrate.…”
Section: Mechanical Properties Of Plasma Polymer Filmsmentioning
confidence: 99%