Structural and mechanical characterization of diamond like carbon films grown by microwave plasma CVD

Sahoo, Sambita; Bhavanasi, Venkateswarlu; Pradhan, S. K.

doi:10.1016/j.surfcoat.2010.02.058

Cited by 16 publications

(8 citation statements)

References 24 publications

Supporting

Mentioning

Contrasting

Unclassified

Order By: Relevance

“…Diamond-like carbon (DLC) containing a large proportion of combined sp 3 /sp 2 -hybrid bonds has extreme properties similar to diamonds [1][2][3][4][5]. It is possible to prepare DLC films for several important applications in the fields of mechanical manufacturing, solar energy devices, electricity devices, and so forth, owing to their excellent properties, including high hardness, high thermal conductivity, high electrical resistivity, low infrared (IR) absorption, transparency to visible light, hydrophobic behavior, and chemical inertness [6][7][8][9][10][11]. Recent researches and technology have focused on keeping high transmission with reduced reflectance capability to maintain enough visibility in a protectively antireflecting coating for solar energy; this type of optical coating can be applied to the surfaces of lenses and other optical devices to reduce reflection [12,13].…”

Section: Introductionmentioning

confidence: 99%

Fabrication of High Transparency Diamond-Like Carbon Film Coating on D263T Glass at Room Temperature as an Antireflection Layer

Lin

Chang

2013

International Journal of Photoenergy

View full text Add to dashboard Cite

This study intends to deposit high transmittance diamond-like carbon (DLC) thin films on D263T glass substrate at room temperature via a diamond powder target using the radio frequency (RF) magnetron sputtering technique. Moreover, various process parameters were used to tune the properties of the thin films by using the Taguchi method. Experimental results show that the content of sp3bonded carbon decreases in accordance with the effect of the substrate temperature. In addition, the hardness of all as-deposited single-layer DLC films ranges from 13.2 to 22.5 GPa, and the RMS surface roughness was improved significantly with the decrease in sputtering pressure. The water repellent of the deposited DLC films improved significantly with the increase of the sp3content, and its contact angle was larger than that of the noncoated one by 1.45 times. Furthermore, the refraction index (n) of all as-deposited DLC films ranges from 1.95 to 2.1 atλ= 600 nm. These results demonstrate that the thickness increased as the reflectance increased. DLC film under an RF power of 150 W possesses high transmissive ability (>81%) and low average reflectance ability (<9.5%) in the visible wavelengths (atλ= 400–700 nm).

show abstract

Section: Introductionmentioning

confidence: 99%

Fabrication of High Transparency Diamond-Like Carbon Film Coating on D263T Glass at Room Temperature as an Antireflection Layer

Lin

Chang

2013

International Journal of Photoenergy

View full text Add to dashboard Cite

show abstract

“…There are several reports of successful applications in the literature. Sol–gel, physical vapor deposition (PVD), and chemical vapor deposition (CVD) methods may produce efficient coating layers that provide biocompatibility, wear, and corrosion resistance to metallic biomaterials 15–18. Stainless steels may benefit from this approach.…”

Section: Introductionmentioning

confidence: 99%

Study of the correlation between corrosion resistance and semi‐conducting properties of the passive film of AISI 316L stainless steel in physiological solution

Antunes

Oliveira

Costa

2011

Materials & Corrosion

View full text Add to dashboard Cite

In this work the corrosion resistance of AISI 316L biomedical stainless steel was assessed through electrochemical impedance spectroscopy (EIS) measurements in Hanks' solution at 37 °C. Specimens were immersed in the electrolyte during 21 days. Semi‐conducting properties of the passive film naturally formed on the surface of the metallic material during the test were evaluated through the Mott–Schottky approach. The aim was to investigate the correlation between corrosion resistance and semi‐conducting properties in the physiological solution. The corrosion resistance was found to decrease with the immersion time. The density of defects in the passive film increased accordingly as indicated by the Mott–Schottky plots. The passive film presented a semi‐conducting behavior with a duplex character. Above the flat band potential the behavior was typical of an n‐type semiconductor whilst below such value it was typical of a p‐type semiconductor. The results from EIS measurements and Mott–Schottky were in good agreement, suggesting that the corrosion resistance of biomedical stainless steels may be associated with the semi‐conducting properties of the passive films formed during immersion in physiological medium.

show abstract

“…Los resultados de espectroscopia Raman muestran la formación de diferentes tipos de enlaces de carbono amorfo. Los espectros Raman de la Figura 12 presentan una estructura típica a la presencia de DLC [14], los picos se encuentran sobre 1440 y 1620 cm -1 , correspondientes a hibridaciones sp 3 y sp 2 respectivamente, también conocidos como picos D y picos G.…”

Section: Pruebas Y Resultadosunclassified

Diseño e implementación de un reactor de deposición química de vapor para producir películas delgadas

Arroyave

Jaramillo

Arenas

et al. 2015

Ingeniare. Rev. chil. ing.

View full text Add to dashboard Cite

RESUMENEl presente trabajo describe el desarrollo y la implementación de un reactor de deposición química de vapor asistido por plasma PECVD (Plasma Enhanced Chemical Vapor Deposition). La construcción se realizó a partir del diseño de los diferentes componentes que lo constituyen: etapa de generación de vacío, etapa de suministro de potencia a la descarga, etapa de extracción iónica, sistema de gases y sistema de calentamiento de los sustratos. La potencia aplicada para la generación de la descarga, que es fundamental para este tipo de reactores, se obtuvo a partir de un horno microondas casero, en el que se encuentra un magnetrón acoplado a una guía de onda y a una cavidad resonante, que es la propia caja del horno microondas. Se reportan algunos resultados preliminares preparados con el reactor implementado; los cuales consisten esencialmente en recubrimientos de tipo DLC (Diamond Like Carbon) sobre sustratos de silicio pulido, que fueron caracterizados por microscopia de fuerza atómica -AFM y espectroscopia Raman. Los resultados muestran que se pueden obtener diversas formas moleculares a base de carbono, principalmente amorfas, por lo cual esta implementación de un reactor PECVD de bajo costo se convierte en una alternativa para el desarrollo de investigaciones en el área de nuevos materiales.Palabras clave: PECVD, microondas, películas delgadas, DLC, simulación numérica. ABSTRACT This work presents the development and implementation of a Plasma Enhanced Chemical VaporDeposition (PECVD) reactor. The reactor construction was made from the design of each subsystem: vacuum generation stage, power supply to the discharge, ion extraction stage, gas system and heating of the substrates. The power applied to generate the discharge, essential for this type of reactor, was obtained from a microwave oven in which the magnetron is coupled to a waveguide and a resonant cavity. Some preliminary results, with the implemented reactor, were reported, which essentially consists in DLC coatings (Diamond Like Carbon) on polished silicon substrates. The coatings were characterized by atomic force microscopy -AFM and Raman spectroscopy. The results show that it is possible to obtain various amorphous molecular carbon forms. For this reason, the implementation of an inexpensive PECVD reactor is an alternative in developing research of new materials.

show abstract

Structural and mechanical characterization of diamond like carbon films grown by microwave plasma CVD

Cited by 16 publications

References 24 publications

Fabrication of High Transparency Diamond-Like Carbon Film Coating on D263T Glass at Room Temperature as an Antireflection Layer

Fabrication of High Transparency Diamond-Like Carbon Film Coating on D263T Glass at Room Temperature as an Antireflection Layer

Study of the correlation between corrosion resistance and semi‐conducting properties of the passive film of AISI 316L stainless steel in physiological solution

Diseño e implementación de un reactor de deposición química de vapor para producir películas delgadas

Contact Info

Product

Resources

About