Abstract:With a view to creating Si LEDs, the structural and luminescent properties of SiO x N y films containing Si nanocrystals in the SiO x N y matrix are studied experimentally. It is found that the film structure (nanocrystal size and concentration, the presence of an amorphous phase, etc.) and the spectrum and intensity of photoluminescence (PL) and electroluminescence (EL) are strongly dependent on the Si stoichiometric excess δ and annealing conditions. At δ ഠ 10% , unannealed films are amorphous and contain Si… Show more
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.