2016
DOI: 10.1016/j.tsf.2015.11.020
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Structural and electrical properties of Ge(111) films grown on Si(111) substrates and application to Ge(111)-on-Insulator

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Cited by 40 publications
(27 citation statements)
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“…Using molecular beam epitaxy (MBE), we firstly formed an undoped Ge(111) layer (∼30 nm) grown at 350 • C (LT-Ge) on the undoped Si(111) substrate (ρ ∼ 1000 Ωcm), followed by an undoped Ge(111) layer (∼70 nm) grown at 700 • C (HT-Ge). [36,37] Next, we grew a 70-nm-thick phosphorous (P)-doped n-Si 0.1 Ge 0.9 (111) layer by MBE at 350 • C on top of the HT-Ge layer. The Ge content x in the SiGe layer was adjusted by controlling the deposition rates of Si and Ge, determined by x-ray diffraction (XRD) measurements of the SiGe layer grown on Ge(111) substrate.…”
mentioning
confidence: 99%
“…Using molecular beam epitaxy (MBE), we firstly formed an undoped Ge(111) layer (∼30 nm) grown at 350 • C (LT-Ge) on the undoped Si(111) substrate (ρ ∼ 1000 Ωcm), followed by an undoped Ge(111) layer (∼70 nm) grown at 700 • C (HT-Ge). [36,37] Next, we grew a 70-nm-thick phosphorous (P)-doped n-Si 0.1 Ge 0.9 (111) layer by MBE at 350 • C on top of the HT-Ge layer. The Ge content x in the SiGe layer was adjusted by controlling the deposition rates of Si and Ge, determined by x-ray diffraction (XRD) measurements of the SiGe layer grown on Ge(111) substrate.…”
mentioning
confidence: 99%
“…We formed an undoped Ge(111) layer (∼28 nm) grown at 350 ○ C (LT-Ge) on a commercial undoped Si(111) substrate (ρ ∼ 1000 Ωcm), followed by an undoped Ge(111) layer (∼70 nm) grown at 700 ○ C (HT-Ge). [26] As the spin transport layer, we grew a 140-nm-thick phosphorous (P)-doped n-Ge(111) layer (doping concentration ∼ 10 19 cm −3 ) by molecular beam epitaxy (MBE) at 350 ○ C on top of the HT-Ge layer. The carrier concentration (n) in the n-Ge(111) layer was estimated to be n ∼ 1 × 10 19 cm −3 .…”
mentioning
confidence: 99%
“…1(a). First, an undoped Ge(111) layer (∼28 nm) (LT-Ge) was grown at 350 • C on a commercial undoped Si(111) substrate (ρ ∼ 1000 Ωcm), followed by an undoped Ge(111) layer (∼70 nm) grown at 700 • C (HT-Ge), where we utilized the two-step growth technique by molecular beam epitaxy (MBE) [46]. Next, a 70nm-or 140-nm-thick phosphorus (P)-doped n + -Ge(111) layer (doping concentration ∼ 10 19 cm −3 ) was grown on top by MBE at 350 • C, as the spin transport layer.…”
Section: Methodsmentioning
confidence: 99%