2009
DOI: 10.1016/j.jpowsour.2008.12.112
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Structural and electrical properties of magnetron sputtered Ti(ON) thin films: The case of TiN doped in situ with oxygen

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Cited by 88 publications
(72 citation statements)
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References 56 publications
(102 reference statements)
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“…Therefore an oversaturated metastable solution of nitrogen in titanium is formed, and the diffraction peak shifting is thus a consequence of this progressive increase of N interstitials in octahedral Ti sites, resulting in lattice distortion of TiN films. These findings were also reported in TiN fi lms prepared by reactive magnetron sputtering [10] and reactive ion beam assisted deposition [11] . Fig.4 shows EBSD scan of TiN film deposited at 0.1 Pa. A single-crystal film has been detected which is confi rmed by the pole fi gure only exhibiting the (100) orientation.…”
Section: Surface Morphologysupporting
confidence: 66%
“…Therefore an oversaturated metastable solution of nitrogen in titanium is formed, and the diffraction peak shifting is thus a consequence of this progressive increase of N interstitials in octahedral Ti sites, resulting in lattice distortion of TiN films. These findings were also reported in TiN fi lms prepared by reactive magnetron sputtering [10] and reactive ion beam assisted deposition [11] . Fig.4 shows EBSD scan of TiN film deposited at 0.1 Pa. A single-crystal film has been detected which is confi rmed by the pole fi gure only exhibiting the (100) orientation.…”
Section: Surface Morphologysupporting
confidence: 66%
“…Furthermore, it can be clearly seen that the intensity of the Ti 2p 3/2 XPS peak from TiN is far weaker than those of corresponding oxide or oxynitride, but no TiO 2 or TiO x N y is detected from the XRD pattern. This case is often common in reported studies, and can be attributed to inevitable surface passivation with atmospheric oxygen before the XPS measurement [10,22]. Therefore, from the XPS spectrum it can be seen that TiN, together with oxynitride and amorphous TiO 2 formed during air exposure all are present on the surface of the TiN sample.…”
Section: Characterization Of Mesoporous Tin Microspheresmentioning
confidence: 81%
“…2b. [22][23][24][25] The existence of TiO 2 is attributed to the reaction of TiN and TiO x N y particles with oxygen from air atmosphere.From the XPS spectra of N 1s (Fig. With the nitridation time is extended to 4-5h, all the characteric peaks are indexed to be that of TiN.…”
Section: Results and Discussion Crystal Phase Analysesmentioning
confidence: 99%