2011
DOI: 10.2109/jcersj2.119.261
|View full text |Cite
|
Sign up to set email alerts
|

Structural and dielectric properties of epitaxial (Ba,Sr)TiO3 films on c-Al2O3 with ultra-thin TiN sacrificial template

Abstract: Using ultra-thin TiN sacrificial template, the epitaxial (Ba,Sr)TiO 3 [BST] films on c-Al 2 O 3 were grown by pulsed laser deposition. TiN epitaxially grew on c-Al 2 O 3 with (111) orientation, which promoted the (111) epitaxial growth of upper BST films. The obtained epitaxial BST films showed significantly larger dielectric constant compared with polycrystalline films directly deposited on c-Al 2 O 3 over the wide temperature range. By inserting the TiN template, the temperature corresponding to maximum diel… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1

Citation Types

0
1
0

Year Published

2013
2013
2013
2013

Publication Types

Select...
1

Relationship

1
0

Authors

Journals

citations
Cited by 1 publication
(1 citation statement)
references
References 32 publications
0
1
0
Order By: Relevance
“…Q ijk à and Q ijk Ãà are the orientation-dependent coefficients of the films with the ijk orientation, which include electrostrictive constants. Q ijk à and Q ijk Ãà with the (111) orientation are defined as 34)…”
Section: Discussionmentioning
confidence: 99%
“…Q ijk à and Q ijk Ãà are the orientation-dependent coefficients of the films with the ijk orientation, which include electrostrictive constants. Q ijk à and Q ijk Ãà with the (111) orientation are defined as 34)…”
Section: Discussionmentioning
confidence: 99%