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2014
DOI: 10.1016/j.apsusc.2013.10.077
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Structural and chemical transformations in the products of the interaction of silica gel with vapours of TiCl4 and H2O

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Cited by 2 publications
(1 citation statement)
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“…The growth rates of H2O(500)+Al(100) and Po2(400)+Al(50) films are similar. For both samples, the maximum growth rate was observed at 250 °C and may have been caused by secondary processes [9,10] that lead to nanocrystal formation and/or formation lithium aluminate. The minimal values of growth rates (0.16-0.22 nm per cycle) were observed for the synthesis at 300 °C and are consistent with growth rates observed in the ALD process [4,5,8].…”
Section: Growth Per Cyclementioning
confidence: 96%
“…The growth rates of H2O(500)+Al(100) and Po2(400)+Al(50) films are similar. For both samples, the maximum growth rate was observed at 250 °C and may have been caused by secondary processes [9,10] that lead to nanocrystal formation and/or formation lithium aluminate. The minimal values of growth rates (0.16-0.22 nm per cycle) were observed for the synthesis at 300 °C and are consistent with growth rates observed in the ALD process [4,5,8].…”
Section: Growth Per Cyclementioning
confidence: 96%