Structural and chemical composition analysis of WCN produced by pulsed vacuum arc discharge

Ospina, Rogelio; Escobar-Rincón, Daniel; Arango, P.J.; Jurado, J. F.

doi:10.1016/j.surfcoat.2013.04.058

Cited by 18 publications

(13 citation statements)

References 46 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The presence of free oxygen might from residual oxygen in the vacuum chamber during the coatings' deposition. After the nitrogen pumped in, there is a new fitted peak located at around 286.1 ± 0.1 eV emerged in the C 1s spectra (Figure 5a3-a5), which is identified as C=N bonds [26]. And with the increasing of nitrogen flow rate, the intensity of C=N peak increases while the intensity of C-W peak decreases.…”

Section: Plasma Discharge Characteristicsmentioning

confidence: 90%

“…Figure 5 shows the XPS core-level spectra, in which Figure 5a1,b1,c1 are overall spectra and Figure 5a2-a5,b2-b5,c2-c5 are detail spectra in the energy region of C 1s, N 1s and W 4f for the deposited coatings with different nitrogen flow rates. As shown in Figure 5a2, the fitted C 1s spectrum centered at 283.5 ± 0.1 eV, 284.5 ± 0.1 eV and 286.5 ± 0.1 eV are recognized as C-W, C-C(:H) and C-O [26,[32][33][34]. The presence of free oxygen might from residual oxygen in the vacuum chamber during the coatings' deposition.…”

Section: Plasma Discharge Characteristicsmentioning

confidence: 92%

“…As is shown in Figure 5b1, when the N 2 flow rate increased from 8 sccm to 24 sccm, the peak intensity of N 1s increased, which was in accordance with the increase of N content in the deposited coatings. And the N 1s spectra in Figure 5b3-b5 show four peaks at 396.9 ± 0.1 eV, 398.1 ± 0.1 eV, 399 ± 0.1 eV and 400.8 ± 0.1 eV, representing WN, W-C-N, C=N and N-O, respectively [25,26,36,37]. It is worth noting that the ratio of peak intensity of W-N to W-C-N and C=N increases with the increasing N 2 flow rate, meaning that more W-N bonds are formed in WCN coatings at higher N concentration.…”

Section: Plasma Discharge Characteristicsmentioning

confidence: 98%

See 2 more Smart Citations

Influences of Nitrogen Flow Rate on Microstructure, Mechanical and Tribological Properties of WCN Coatings Deposited by HiPIMS

Yang

Huang

et al. 2021

Coatings

View full text Add to dashboard Cite

Tungsten carbide (WC) and Tungsten carbonitride (WCN) coatings are deposited by reactive high-power impulse magnetron sputtering (HiPIMS) with various nitrogen gas flow rates. The characteristics of discharge current and plasma optical emission of HiPIMS are recorded by oscilloscope (OSC) and optical emission spectroscopy (OES). The results exhibit that the peak discharge currents and the intensities of optical emission spectra lines are significantly influenced by the addition of nitrogen. The elemental concentration, microstructure, mechanical and tribological properties in ambient temperature and high temperature of deposited coatings are investigated by a wide variety of techniques such as energy dispersive spectroscopy (EDS), X-ray diffraction (XRD), nano-indentation measurement, scanning electron microscope (SEM), atomic force microscopy (AFM), X-ray photoelectron spectroscopy (XPS), and ball-on-disk tribometer. The results show that WC/WCN coatings with different microstructures, mechanical properties and tribological properties have been produced by controlling the flow rate of N2. Meanwhile, with the N2 flow rate increasing from 0 sccm to 24 sccm, (101) diffraction peak shifts to low angle. Moreover, (102) and (110) peaks’ intensities and the angle of (101) peak of β-W2C phase of the deposited WCN coatings decrease and disappear, and the average grain size decreases from 8.9 nm to 6.4 nm. XPS results show that the intensities of C=N, W–N, W–C–N, and N–O peaks increase while the intensity of C–W peak decreases. The deposited coatings change from slight columnar type to a typically dense and featureless structure, and the surface roughness decreases from Ra 11.6 nm at 0 sccm to Ra 5.7 nm at 24 sccm. The variation of nitrogen flow also plays a role in the mechanical properties of the coatings. It is found that the maximum hardness and elastic modulus of 35.6 GPa and 476.5 GPa appear at 16 sccm N2 flow rate. The results of wear tests demonstrate the addition of nitrogen slightly deteriorates tribological properties at room temperature (25 °C), but can remarkably improve tribological properties at high temperature (400 °C) of WC/WCN coatings deposited with an appropriate flow rate of nitrogen.

show abstract

Section: Plasma Discharge Characteristicsmentioning

confidence: 90%

Section: Plasma Discharge Characteristicsmentioning

confidence: 92%

Section: Plasma Discharge Characteristicsmentioning

confidence: 98%

See 1 more Smart Citation

Influences of Nitrogen Flow Rate on Microstructure, Mechanical and Tribological Properties of WCN Coatings Deposited by HiPIMS

Yang

Huang

et al. 2021

Coatings

View full text Add to dashboard Cite

show abstract

“…[1][2][3][4][5][6] Because of these technological applications, there is a great interest in obtaining high-quality thin films and coatings; for this purpose, there is a requirement to develop systematic experimental studies of plasma parameters and to analyse the relationship between the properties of the plasma and the characteristics of the deposited coatings during the deposition process. These features make WCN thin films appropriate for protective coatings and diffusion barriers in microelectronic devices.…”

Section: Introductionmentioning

confidence: 99%

Plasma diagnostic and microstructural study of WCN coatings growth by pulsed vacuum arc discharge

Escobar

Ospina

Quintero

et al. 2018

Contributions to Plasma Physics

View full text Add to dashboard Cite

In this work, we present a study of the plasma evolution during tungsten carbon nitride (WCN) coatings production using the repetitive pulsed arc technique. For the coatings production, a tungsten carbide (WC) target, and a mixture of argon and nitrogen as the filled gas were used. The study was carried out for discharges generated with one, two, three, and four pulses. The WCN coatings were characterized by X-ray diffraction (XRD) to identify the phases present in this material. The plasma was experimentally studied by optical emission spectroscopy (OES). A correlation was found between the spectral lines behavior and the material composition evolution. As the number of pulses increased, the intensity of the spectral lines also increased, especially in the case of the atomic lines of nitrogen, NI. The results were analysed to obtain information regarding the reactions in the plasma, as well as the electron temperature and density.

show abstract

“…Ternary transition-metal carbonitride coatings have gained increased interest in recent years, because their mechanical and tribological properties can outperform those of the binary nitride and carbide coatings [25][26][27][28][29][30][31][32]. For example, the solid solution TiC x N y compound deposited by cathodic arc ion plating exhibits a lower friction and wear and a higher hardness than TiN, and is therefore promising for tribological applications [25].…”

Section: Introductionmentioning

confidence: 99%

Epitaxial NbC N1−(001) layers: Growth, mechanical properties, and electrical resistivity

Zhang

Balasubramanian

Ozsdolay

et al. 2015

Surface and Coatings Technology

View full text Add to dashboard Cite

HardnessNbC x N 1−x layers were deposited on MgO(001) by reactive magnetron co-sputtering from Nb and graphite targets in 5 mTorr pure N 2 at T s = 600-1000°C. The anion-to-Nb ratio of 1.09 ± 0.05 is independent of T s and indicates a nearly stoichiometric rock-salt structure Nb(N,C) solid solution. In contrast, the C-to-N ratio increases from 0.20-0.59 for T s = 600-1000°C, which is attributed to a low C sticking probability at high N surface coverage at low T s . Layers grown at T s ≥ 700°C are epitaxial single-crystals with a cube-on-cube relationship to the substrate, (001) NbCN ||(001) MgO and [100] NbCN ||[100] MgO , as determined from X-ray diffraction θ-2θ and ϕ-scans. Reciprocal space mapping on a NbC 0.37 N 0.63 layer deposited at T s = 1000°C indicates an in-plane compressive strain of −0.4% and a relaxed lattice constant of 4.409 ± 0.009 Å. The lattice constant of NbC x N 1−x increases with x, consistent with a linear increase predicted by first-principles density functional calculations. The calculated bulk modulus, 307 GPa for NbN and 300 GPa for NbC, is nearly independent of x. Similarly, c 11 increases slightly from 641 to 666 GPa, but c 12 decreases considerably from 140 to 117 GPa, and c 44 more than doubles from 78 to 171 GPa as x increases from 0 to 1, indicating a transition from ductile NbN to brittle NbC. This also results in an increase in the predicted isotropic elastic modulus from 335 to 504 GPa, which is in good agreement with the measured 350 ± 12 GPa for NbC x N 1−x (001) with x = 0.19-0.31. The hardness H = 22 ± 2 GPa of epitaxial NbC x N 1−x layers is nearly independent of x = 0.19-0.37 and T s = 700-1000°C, but is reduced to H = 18.2 ± 0.8 GPa for the nanocrystalline layer deposited at T s = 600°C. The electrical resistivity decreases strongly with increasing T s b 800°C, due to increasing crystalline quality, and is 262 ± 21 μΩ-cm at room temperature and 299 ± 22 μΩ-cm at 77 K for T s ≥ 800°C, indicating weak carrier localization due to the random distribution of C atoms on anion sites.

show abstract

Structural and chemical composition analysis of WCN produced by pulsed vacuum arc discharge

Cited by 18 publications

References 46 publications

Influences of Nitrogen Flow Rate on Microstructure, Mechanical and Tribological Properties of WCN Coatings Deposited by HiPIMS

Influences of Nitrogen Flow Rate on Microstructure, Mechanical and Tribological Properties of WCN Coatings Deposited by HiPIMS

Plasma diagnostic and microstructural study of WCN coatings growth by pulsed vacuum arc discharge

Epitaxial NbC N1−(001) layers: Growth, mechanical properties, and electrical resistivity

Contact Info

Product

Resources

About