“…Base metal could serve as both substrate and electrode, allowing a easy process for device fabrication by avoiding the complex micro-machined processes of Si based materials. Pb(Zr,Ti)O 3 (PZT) thin films with excellent ferroelectric and piezoelectric properties have been successfully deposited on Ti, Ni, and stainless steel (SS) substrates [6][7][8]. Addition of a buffer layer, such as PbTiO 3 , conductive LaNiO 3 et al plays an important role to balance the thermal and lattice mismatch between the films and metal [9].…”