Stretching-tunable metal gratings fabricated on an elastomeric substrate using a water-soluble sacrificial layer

Gu, Ronghua; Ji, Min; Xuan, Yi; Cui, Yushuang; Yuan, Changsheng; Li, Wen‐Di; Ge, Haixiong; Chen, Yanfeng

doi:10.1007/s00339-015-9270-5

Cited by 15 publications

(12 citation statements)

References 28 publications

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“…The fabrication process of the epidermal PVDF sensor mainly includes a microelectro-mechanical system (MEMS) process for fabricating a serpentine structure on an Si wafer, using a transfer printing process for moving the electronic device to the poly-di-methyl-siloxane (PDMS) substrate and directly printing it onto the surface of the artificial skin (Gu et al, 2015). Figure 2 shows the main fabrication process of the epidermal electronic device.…”

Section: Fabrication Processmentioning

confidence: 99%

Wearable human–machine interface based on PVDF piezoelectric sensor

Dong

Xiao

et al. 2016

Transactions of the Institute of Measurement and Control

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Flexible and stretchable electronics technologies have been attracting increasing attention owing to their potential applications in personal consumed electronics, wearable human–machine interfaces (HMI) and the Internet of Things (IoTs). This paper proposes an HMI based on a polyvinylidene difluoride (PVDF) sensor and laminated it onto the surface of the skin for signal classification and controlling the motion of a mobile robot. The PVDF sensor with ultra-thin stretchable substrate can make conformal contact with the surface of the skin for more accurate measurement of the electrophysiological signal and to provide more accurate control of the actuators. Microelectro-mechanical system (MEMS) technologies and transfer printing processes are adopted for fabrication of the epidermal PVDF sensor. Sensors placed on two wrists would generate two different signals with the fist clenched and loosened. It can be classified into four signals with a combination of the signals from both wrists, i.e. four control modes. Experiments demonstrated that PVDF sensors may be used as an HMI to control the motion of a mobile robot remotely.

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Section: Fabrication Processmentioning

confidence: 99%

Wearable human–machine interface based on PVDF piezoelectric sensor

Dong

Xiao

et al. 2016

Transactions of the Institute of Measurement and Control

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“…The transfer printing method refers to the process of transferring an active structure from a rigid substrate to a soft substrate . Direct fabrication of metal patterns on elastomeric substrates using traditional process (such as liftoff process) is challenging since elastometic substrates deform when immersed into chemical solutions . Transfer printing approach offers strong bonding between elastomeric substrate and the active photonic structure, as well as easy processing with no need for etching methods or dissolving of sacrificial layers.…”

Section: Fabrication Methodsmentioning

confidence: 99%

“…b) Laser spot diffracted by tunable grating in a full stretch and release cycle, the laser spot returned to its initial position upon release. Reproduced with permission . Copyright 2015, Springer.…”

Section: Flexible and Stretchable Photonic Sensorsmentioning

confidence: 99%

“…Guerrero and co‐workers fabricated a diffraction grating by depositing 100 nm Au film onto a 1200 lines per mm triangular groove profiled PDMS substrate, and the diffraction grating demonstrated an inverse relationship between applied strain and first‐order diffraction efficiency . Gu et al fabricated a flexible metal grating on PDMS through a metal transfer method with polyvinyl alcohol (PVA) as a sacrificial layer . Reversibly stretching of the metal grating period in the range of 550 nm to 841 nm could be achieved by applying strain on PDMS substrate.…”

Section: Flexible and Stretchable Photonic Sensorsmentioning

confidence: 99%

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Flexible and Stretchable Photonic Sensors Based on Modulation of Light Transmission

Wang

2019

Advanced Optical Materials

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Emerging technologies, such as soft robotics, electronic skin, wearable devices, and flexible display, demand the practical application of photonic sensors that are bendable and stretchable, as conventional photonic sensors are fabricated with rigid materials and substrates, rendering their applications in deformable state or soft systems infeasible. Thus, the development of flexible and stretchable photonic sensors, which can be wrapped onto curved surfaces and easily deformed into different shapes and sizes, has inspired great research interest. This article presents recent progress in the development of flexible and stretchable photonic sensors, particularly photonic sensors based on the modulation of light transmission, from the aspects of materials synthesis and selection, structure design, fabrication methods, sensing characteristics, and performances. The challenges and future research opportunities related to flexible and stretchable photonic sensors and their potential application prospects are also discussed.

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“…An electrical charge was detected and signals classified by integrating a piezosensor and PVDF. First, a serpentine PVDF sensor was created on a polyvinylalcohol (PVA) film above an Si wafer via a micro-electromechanical system and transferred to a polydimethylsiloxane (PDMS) substrate [ 73 ]. The PVA film promoted the dissolution of the Si wafer in water.…”

Section: Types Of Sensor Mechanismmentioning

confidence: 99%

Review: Sensors for Biosignal/Health Monitoring in Electronic Skin

Lee

Kim

et al. 2021

Polymers

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Skin is the largest sensory organ and receives information from external stimuli. Human body signals have been monitored using wearable devices, which are gradually being replaced by electronic skin (E-skin). We assessed the basic technologies from two points of view: sensing mechanism and material. Firstly, E-skins were fabricated using a tactile sensor. Secondly, E-skin sensors were composed of an active component performing actual functions and a flexible component that served as a substrate. Based on the above fabrication processes, the technologies that need more development were introduced. All of these techniques, which achieve high performance in different ways, are covered briefly in this paper. We expect that patients’ quality of life can be improved by the application of E-skin devices, which represent an applied advanced technology for real-time bio- and health signal monitoring. The advanced E-skins are convenient and suitable to be applied in the fields of medicine, military and environmental monitoring.

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Stretching-tunable metal gratings fabricated on an elastomeric substrate using a water-soluble sacrificial layer

Cited by 15 publications

References 28 publications

Wearable human–machine interface based on PVDF piezoelectric sensor

Wearable human–machine interface based on PVDF piezoelectric sensor

Flexible and Stretchable Photonic Sensors Based on Modulation of Light Transmission

Review: Sensors for Biosignal/Health Monitoring in Electronic Skin

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