Stress influences on the ultrasonic transducers

Lee, Seungmock; Tanaka, Takashi; Inoue, Koji; Kim, Jong Min; Shin, Young-Eui; Okuyama, Masanori

doi:10.1016/j.sna.2004.10.026

Cited by 20 publications

(10 citation statements)

References 12 publications

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“…Depending on the process and the deposition conditions, the magnitude of the residual stress can vary widely. The effects of stress on the performance of ultrasound transducers has been treated analytically by many previous authors [9]- [12].…”

Section: Introductionmentioning

confidence: 99%

Data-Over-Sound With PMUTs

Gupta

Nayak

Ashok

et al. 2022

IEEE Open J. Ultrason., Ferroelect., Freq. Contr.

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Data-over-sound is an emerging technology for digital communication which uses frequencies at the upper bounds of human hearing, usually between 15 kHz to 25 kHz. We report a successful development of Piezoelectric Micromachined Ultrasound Transducers (PMUTs) for low-power data-over-sound applications. Piezoelectric thin films used in PMUTs can have high residual tensile stresses ranging from 300 MPa to 1.5 GPa. These stresses have the effect of increasing the resonant frequencies of the transducers, making it a challenge to fabricate low frequency devices. Using the optimum dimensions by estimating the net residual stress in the fabricated diaphragms, transducers suitable for a frequency range of 17 kHz to 21 kHz were fabricated, capable of generating as much as 83 dB of sound pressure level at a distance of 5 cm in continuous operation.

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Section: Introductionmentioning

confidence: 99%

Data-Over-Sound With PMUTs

Gupta

Nayak

Ashok

et al. 2022

IEEE Open J. Ultrason., Ferroelect., Freq. Contr.

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“…Moreover, the residual stress is an important influencing factor for the resonant frequency and sensitivity of the biosensors. Several researchers investigated the effects of residual stress on the diaphragm's resonant frequency, either theoretically or by finite element analysis [10][11][12]. They concluded that residual stress stiffens the diaphragm and increases its resonant frequency.…”

Section: Introductionmentioning

confidence: 99%

Effects of Residual Stress on the Hydro-Elastic Vibration of Circular Diaphragm

Zhao¹,

Yu²

2012

WJM

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The effects of residual stress on the hydro-elastic vibration of circular diaphragm are theoretically investigated by using the added mass approach. The Kirchhoff theory of plates is used to model the elastic thin circular diaphragm on an aperture of an infinite rigid wall and in contact with a fluid on one side. The fluid is assumed to be incompressible and inviscid and the velocity potential is used to describe its irrotational motion. A non-dimensional tension parameter is defined, and the effects of the tension parameter on the frequency parameters and mode shapes of the diaphragm in the air are presented. The Hankel transform is applied to solve the fluid-diaphragm coupled system; boundary conditions are expressed by integral equations. Finally, the effects of residual stress on the non-dimensional added virtual mass incremental (NAVMI) factors of the diaphragm contact with a fluid on one side are investigated. It is found that the effects of the residual stress cannot be neglected when the edges of the circular diaphragm are clamped. The effects of residual stress for NAVMI factors can be increases 11% when the non-dimensional tension parameter is 1000.<o:p></o:p>

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“…Several researchers investigated the effects of initial tension on the diaphragm's resonant frequency, either theoretically or by finite element analysis [6,7]. They concluded that initial tension stiffens the diaphragm and increases its resonant frequency.…”

Section: Introductionmentioning

confidence: 99%

Investigation of residual stress and its effects on the vibrational characteristics of piezoelectric-based multilayered microdiaphragms

Olfatnia

Ong

et al. 2009

J. Micromech. Microeng.

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In this study, residual stress influences on the vibrational behavior of piezoelectric circular microdiaphragm-based biosensors are investigated theoretically and experimentally. The piezoelectric microdiaphragm was first fabricated by combining sol-gel PZT thin film and MEMS technology. The stress measurements by the wafer curvature method and the micro-Raman technique demonstrate that high tensile stresses are generated in the upper films (Pt/PZT/Pt), while the silicon oxide layer experiences a compressive stress. After backside etching of the microdiaphragm, the suspended membrane method was used to measure the average stress and equivalent Young's modulus of the diaphragm, which were 96 MPa and 106.4 GPa, respectively. The dynamic behavior of the fabricated sensor under this stress was then investigated. A comprehensive mechanics model based on vibration modes is presented and the natural frequencies of the diaphragm are obtained. A nondimensional tension parameter is defined, and effects of this parameter on the resonant frequency of the diaphragm are presented. It was concluded that both flexural rigidity and tension contribute to the resonant frequency of the diaphragm sensor. Finally, the resonant frequencies of the fabricated sensor were measured by impedance analysis and laser vibrometry techniques. These frequencies were compared with their theoretical counterparts and a good agreement was observed.

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Stress influences on the ultrasonic transducers

Cited by 20 publications

References 12 publications

Data-Over-Sound With PMUTs

Data-Over-Sound With PMUTs

Effects of Residual Stress on the Hydro-Elastic Vibration of Circular Diaphragm

Investigation of residual stress and its effects on the vibrational characteristics of piezoelectric-based multilayered microdiaphragms

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