Stress-Driven Artificial Hair Cell for Flow Sensing

Rizzi, Francesco; Qualtieri, Antonio; Chambers, Lily D.; Epifani, G.; Megill, William; Vittorio, Massimo De

doi:10.1007/978-3-642-41446-6_19

Cited by 9 publications

(15 citation statements)

References 38 publications

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“…For a beam length of 1500

sans-serifμ normalm

, this stress value generates an upwards bending up to 1200

sans-serifμ normalm

[14]. The placement of a piezoresistive strain gauge on the most stressed part of these mechanical elements, realized by deposition of metallic resistances or ion implantation, allows these devices to measure mechanical strain caused by fluid flow and shear forces [7,10,15]. …”

Section: Methodsmentioning

confidence: 99%

“…A step forward came when the stressed structural element was designed as a multilayer structure. The stress control in the bent structure was obtained by carefully engineering the material stress difference among each multilayer component [ 10 ]. It was the relative difference among the internal stresses of different layers grown by CVD or epitaxial growth on a sacrificial layer that generated the required gradient in the stress profile through the multilayer thickness.…”

Section: Methodsmentioning

confidence: 99%

“…In the past, different stressor layers were micromachined on a silicon or silicon-on-insulator wafer, which provided the required residual stress to shape cantilevers that bent out of the plane after releasing, such as silicon nitride [ 7 , 10 , 15 ], silicon dioxide [ 9 , 37 ] and an aluminum nitride/molybdenum multilayer [ 26 ].…”

Section: Methodsmentioning

confidence: 99%

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Nitride-Based Materials for Flexible MEMS Tactile and Flow Sensors in Robotics

Abels

Mastronardi

Guido

et al. 2017

Sensors

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The response to different force load ranges and actuation at low energies is of considerable interest for applications of compliant and flexible devices undergoing large deformations. We present a review of technological platforms based on nitride materials (aluminum nitride and silicon nitride) for the microfabrication of a class of flexible micro-electro-mechanical systems. The approach exploits the material stress differences among the constituent layers of nitride-based (AlN/Mo, SixNy/Si and AlN/polyimide) mechanical elements in order to create microstructures, such as upwardly-bent cantilever beams and bowed circular membranes. Piezoresistive properties of nichrome strain gauges and direct piezoelectric properties of aluminum nitride can be exploited for mechanical strain/stress detection. Applications in flow and tactile sensing for robotics are described.

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“…For a beam length of 1500

sans-serifμ normalm

, this stress value generates an upwards bending up to 1200

sans-serifμ normalm

Section: Methodsmentioning

confidence: 99%

Section: Methodsmentioning

confidence: 99%

See 1 more Smart Citation

Nitride-Based Materials for Flexible MEMS Tactile and Flow Sensors in Robotics

Abels

Mastronardi

Guido

et al. 2017

Sensors

Self Cite

View full text Add to dashboard Cite

show abstract

“…A cantilever, projecting into the flow, is deformed due to the mechanical load applied by the moving fluid. These deformations change the electrical properties (e.g., capacitance and resistance) of the cantilever which are picked up by specialized circuits (Rizzi et al 2014). For an extensive review on MEMS-based and other artificial hair cell designs, see Tao and Yu (2012) and Liu et al (2016).…”

Section: Robotics Experimentsmentioning

confidence: 99%

Behavior, Electrophysiology, and Robotics Experiments to Study Lateral Line Sensing in Fishes

Haehnel-Taguchi

Akanyeti

Liao

2018

Integrative and Comparative Biology

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The lateral line system is a sensory system unique to fishes and amphibians. It is composed of distributed mechanosensory hair cell organs on the head and body (neuromasts), which are sensitive to pressure gradients and water movements. Over the last decade, we have pursued an interdisciplinary approach by combining behavioral, electrophysiology, and robotics experiments to study this fascinating sensory system. In behavioral and electrophysiology experiments, we have studied the larval lateral line system in the model genetic organism, zebrafish (Danio rerio). We found that the lateral line system, even in 5-day-old larvae, is involved in an array of behaviors that are critical to survival, and the deflection of a single neuromast can elicit a swimming response. In robotics experiments, we used a range of physical models with distributed pressure sensors to better understand the hydrodynamic environments from the local perspective of a fish or robot. So far, our efforts have focused on extracting control-related information for a range of application scenarios including characterizing unsteady flows such as Kármán vortex streets for station holding. We also used robot models to test biological hypotheses on how morphology and movement of fishes affect lateral line sensing. Overall, with this review we aim to increase the visibility and accessibility of this multi-disciplinary research approach.

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“…The flow sensor quantifies the amount of air exhaled through the measurement of the air flow rate at a specific time period. In many biological species, hair cells provide flow sensory functions . The design methodology considered for the present biosensor is inspired from these hair cells and is schematically shown in Figure .…”

Section: Modelling Analysismentioning

confidence: 99%

A modelling study of a new malignant hyperthermia diagnosis device

Ricardez‐Sandoval

2015

Can J Chem Eng

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This paper presents a mathematical model for better understanding of the functionality of a newly-proposed Malignant Hyperthermia (MH) diagnosis device. MH is a rare life-threatening condition that is usually triggered by exposure to certain drugs such as a volatile anesthetic agent, neuromuscular blocking agent, or succinylcholine. It is highly recommended to have this condition diagnosed immediately after its common symptoms appear. However, it is often only when the patient has had a severe or fatal reaction to anesthetic that a diagnosis is finally made. Due to this, many deaths have been reported before a patient has been diagnosed with this condition. Further for the diagnosis, the patients are subject to an expensive clinical diagnostic procedure and it is also necessary to continuously monitor the condition. In this study, a micro-total analysis system for MH diagnosis through the assessment of the end-tidal CO 2 concentration level that can also aid point-of-care testing is presented. Various model parameters of the system are considered and their effects on the behaviour of the system are assessed. The results presented in this study are based on the proposed mathematical model for the new MH diagnosis device and can be used to evaluate the device's functionality and performance prior to its manufacture.

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Stress-Driven Artificial Hair Cell for Flow Sensing

Cited by 9 publications

References 38 publications

Nitride-Based Materials for Flexible MEMS Tactile and Flow Sensors in Robotics

Nitride-Based Materials for Flexible MEMS Tactile and Flow Sensors in Robotics

Behavior, Electrophysiology, and Robotics Experiments to Study Lateral Line Sensing in Fishes

A modelling study of a new malignant hyperthermia diagnosis device

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