Stress and structural properties of diamond-like carbon films deposited by electron beam excited plasma CVD

Ban, Masashi; Hasegawa, Takeshi; Fujii, Sadao; Fujioka, Junzo

doi:10.1016/s0925-9635(02)00265-0

Cited by 62 publications

(25 citation statements)

References 21 publications

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“…The results shown here are obviously produced in a non-equilibrium growth mode since plasma is used. As already mentioned, the properties of DLC films strongly depend on the precursor gas and procedure used for the deposition [16][17][18][19][20][21][22][23][24][25]. In the f-and r-deposition mechanism, acetylene was used as a carbonaceous plasma source while the plasma source used in the study of Maheswaran et al was methane [27].…”

Section: Overall Surface Morphologies and Characterization Of Grainsmentioning

confidence: 99%

“…Films with a lower value of sp 3 /sp 2 ratio instead have properties closer to graphite, such as softness and good electrical conductivity [1]. The hydrogen content mainly affects the film density and hardness, the surface roughness [16][17][18][19][20] and the intrinsic stress of the film [21][22][23][24][25]. The reduction of the hydrogen content leads to a decrease of the density and hardness of the film, producing high structural disorder [17,18].…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Surface morphology and grain analysis of successively industrially grown amorphous hydrogenated carbon films (a-C:H) on silicon

Catena

McJunkin

Agnello

et al. 2015

Applied Surface Science

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Section: Overall Surface Morphologies and Characterization Of Grainsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Surface morphology and grain analysis of successively industrially grown amorphous hydrogenated carbon films (a-C:H) on silicon

Catena

McJunkin

Agnello

et al. 2015

Applied Surface Science

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“…80 Many studies have been performed to explore the origin of compressive stress in DLC lms. 84 Generally, the intrinsic stress in DLC lms is compressive and controlled by the growth mechanism of sub-implantation, which can be understood in terms of the lm structure and the ion bombardment during the process of lm growth. 81,82 Initially, Grill and Patel 83 investigated the correlation between stress and hydrogen in a lm.…”

Section: Internal Stressmentioning

confidence: 99%

Recent advances in the mechanical and tribological properties of fluorine-containing DLC films

Zhang

Wang

et al. 2015

RSC Adv.

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Fluorine easily substitutes hydrogen in DLC films due to its monovalence and high electronegativity. The peculiarities of fluorine bestow low surface energy, low inner stress, good thermal stability, preeminent tribological properties and biocompatibility on fluorine-containing, diamond-like carbon (F-DLC) films.Although there are some reviews that introduce the important advances in DLC films, they are not particularly focused on the promising F-DLC films. In this review, we mainly concentrate on the mechanical and tribological properties of F-DLC films. The mechanical properties, including hardness, modulus, and inner stress, will be discussed thoroughly. More importantly, the eminent tribological properties of F-DLC films would be emphasized based on the surface passivation and repulsive forces induced by fluorine atoms from the surface chemical and micro-mechanical viewpoints. Finally, some existing challenges and promising breakthroughs about F-DLC films are also proposed. It is expected that these films would be produced on a large scale and applied extensively in industrial applications such as micro-electro-mechanical systems, ultralarge scale integrated circuits, thin film transistor liquid crystal displays and biomedical devices.

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“…These stresses are known to vary as a function of the bias voltage [5,6], power density [7,8], and gas precursor [5]. Modern techniques allow for the deposition of multi-layer or gradient coatings, as well as doping or alloying of a DLC coating, and these are used to reduce internal stresses or to achieve some extra functionality.…”

Section: Introductionmentioning

confidence: 99%

The friction of diamond-like carbon coatings in a water environment

et al. 2013

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Diamond-like carbon (DLC) coatings are known to provide beneficial mechanical and tribological properties in harsh environments. Their combination of high wear resistance and low friction has led to their extensive use in any number of industries. The tribological performance of a DLC coating is varied however, and the frictional response is known to be strongly dependent on the surrounding environment, as well as the material composition and bonding structure of the DLC coating. This paper presents an up-to-date review on the friction of DLC coatings in a water environment, with a special focus on transfer layer formation and tribochemistry.

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Stress and structural properties of diamond-like carbon films deposited by electron beam excited plasma CVD

Cited by 62 publications

References 21 publications

Surface morphology and grain analysis of successively industrially grown amorphous hydrogenated carbon films (a-C:H) on silicon

Surface morphology and grain analysis of successively industrially grown amorphous hydrogenated carbon films (a-C:H) on silicon

Recent advances in the mechanical and tribological properties of fluorine-containing DLC films

The friction of diamond-like carbon coatings in a water environment

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