2009
DOI: 10.1088/0264-9381/26/17/175007
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Strength testing and SEM imaging of hydroxide-catalysis bonds between silicon

Abstract: Silicon is under consideration as a substrate material for the mirror masses and quasi-monolithic suspension stages of 'third generation' gravitational wave detectors. Identifying a jointing technique to attach the silicon suspension elements to the optics with repeatable high strength and low mechanical loss is critical. Hydroxide-catalysis bonding is the method of choice for current quasimonolithic silica suspensions. Here we present measurements of the shear strength of hydroxide-catalysis bonds between sil… Show more

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Cited by 29 publications
(39 citation statements)
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References 23 publications
(21 reference statements)
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“…8, the breaking strength, obtained for the Si − Si and Si − Al 2 O 3 combinations with a λ/10 flatness quality, provides a mean value of 8.7 ± 3.7 M P a, as just presented in [27]. Comparing this measure with the Si-Si bonding value in [25], it is visible a small improvement even if the error is large. This difference is probably due to the distinct silicate bonding procedure used and to the sample geometry.…”
Section: Discussionsupporting
confidence: 55%
“…8, the breaking strength, obtained for the Si − Si and Si − Al 2 O 3 combinations with a λ/10 flatness quality, provides a mean value of 8.7 ± 3.7 M P a, as just presented in [27]. Comparing this measure with the Si-Si bonding value in [25], it is visible a small improvement even if the error is large. This difference is probably due to the distinct silicate bonding procedure used and to the sample geometry.…”
Section: Discussionsupporting
confidence: 55%
“…Materials reported in the literature as substrate material for bonding are fused silica [7-9, 13, 28, 32-37], Zerodur ® [13,21], ULE ® [21,22], SiC [15][16][17][18][19][20], silicon [32,[38][39][40][41], sapphire [25,34,40,42], BK7 [18,26], glass and aluminium [26], soda lime glass [27] and PZT [23,24]. Examples of hydroxide solutions commonly used for bonding are potassium hydroxide (KOH) [9,13,21,25,33,36,40,41], sodium hydroxide (NaOH) [13,21,22,25] and sodium silicate solution [13, 16-21, 23-26, 28, 32, 34-39], which is a sodium hydroxide solution with a colloidal silicate (typically 10-14% NaOH, 27% SiO 2 ) dissolved in water.…”
Section: Hcbmentioning
confidence: 99%
“…Studies of HCBs of silicon to silicon have been reported by van Veggel et al [32], Dari et al [40], Lorenzini et al [41], and Beveridge et al [38,39]. Most of the work reported in the literature focussed on the shear and tensile strength of bonds between silicon and sapphire, along with initial studies of the thermal conductance of bonds and scanning electron microscopy imaging of bonded interfaces.…”
Section: Silicon and Sapphire Mirror Suspensionsmentioning
confidence: 99%
“…The strength of hydroxide catalysis bonds between different materials such as fused silica, silicon, sapphire, ULE and zerodur have been studied previously [17,20,[31][32][33][34][35][36][37]. A summary of most of the results can be found in Ref.…”
Section: Strength Testingmentioning
confidence: 99%
“…This experimental arrangement is discussed in Refs. [18,20,31,34,36] and a schematic representation is shown in Fig. 5.…”
Section: Strength Testermentioning
confidence: 99%