Anisotropic conductive adhesive films (ACFs) have been used for electronic assemblies such as the connection between a liquid crystal display panel and a flexible printed circuit board. ACF interconnection is expected to be a key technology for flip chip packaging, system-in-packaging, and chip size packaging. This paper presents a methodology for quantitative evaluation of the delamination in a flip chip interconnected by an ACF under moisture/reflow sensitivity tests. Moisture concentration after moisture absorption was obtained by the finite element method. Then, the vapor pressure in the flip chip during solder reflow process was estimated. Finally the delamination was predicted by comparing the stress intensity factor of an interface crack due to vapor pressure with the delamination toughness. It is found that the delamination is well predicted by the present methodology.Index Terms-Anisotropic conductive adhesive films (ACFs), delamination toughness, flip chip, moisture/reflow sensitivity test, reliability, stress intensity factor.