Streaming metal plasma generation by vacuum arc plasma guns

MacGill, R.A.; Dickinson, M.R.; Anders, André; Monteiro, O.R.; Brown, Ian

doi:10.1063/1.1148718

Cited by 83 publications

(45 citation statements)

References 5 publications

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“…The cathode (cylinder of 6.35 mm diameter and about 20 mm length) was mounted using an arc miniature gun, which is described in [24]. It was set to point directly at the MEA orifice (50 μm bore) at a distance of 0.27 m. All other distances, e.g.…”

Section: Methodsmentioning

confidence: 99%

Time-resolved ion energy and charge state distributions in pulsed cathodic arc plasmas of Nb−Al cathodes in high vacuum

Zöhrer

Anders

Franz

2018

Plasma Sources Sci. Technol.

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Cathodic arcs have been utilized in various applications including the deposition of thin films and coatings, ion implantation, and high current switching. Despite substantial progress in recent decades, the physical mechanisms responsible for the observed plasma properties are still a matter of dispute, particularly for multi-element cathodes, which can play an essential role in applications. The analysis of plasma properties is complicated by the generally occurring neutral background of metal atoms, which perturbs initial ion properties. By using a time-resolved method in combination with pulsed arcs and a comprehensive Nb−Al cathode model system, we investigate the influence of cathode composition on the plasma, while making the influence of neutrals visible for the observed time frame. The results visualize ion detections of 600 μs plasma pulses, extracted 0.27 m from the cathode, resolved in mass-per-charge, energy-per-charge and time. Ion properties are found to be strongly dependent on the cathode material in a way that cannot be deduced by simple linear extrapolation. Subsequently, current hypotheses in cathodic arc physics applying to multi-element cathodes, like the so-called 'velocity rule' or the 'cohesive energy rule', are tested for early and late stages of the pulse. Apart from their fundamental character, the findings could be useful in optimizing or designing plasma properties for applications, by actively utilizing effects on ion distributions caused by composite cathode materials and charge exchange with neutrals.

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Section: Methodsmentioning

confidence: 99%

Time-resolved ion energy and charge state distributions in pulsed cathodic arc plasmas of Nb−Al cathodes in high vacuum

Zöhrer

Anders

Franz

2018

Plasma Sources Sci. Technol.

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“…The pulsed cathodic arc source has two cathodes in one anode body [11], representing a modified "minigun" [12]. The cathodes are pulsed using the "triggerless" arc initiation method [13].…”

Section: Methodsmentioning

confidence: 99%

Electrical properties of a-C: Mo films produced by dual-cathode filtered cathodic arc plasma deposition

Sansongsiri

Anders

Yotsombat

2008

Diamond and Related Materials

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Molybdenum-containing amorphous carbon (a-C:Mo) thin films were prepared using a dual-cathode filtered cathodic arc plasma source with a molybdenum and a carbon (graphite) cathode. The Mo content in the films was controlled by varying the deposition pulse ratio of Mo and C. Film sheet resistance was measured in situ at process temperature, which was close to room temperature, as well as ex situ as a function of temperature (300-515 K) in ambient air. Film resistivity and electrical activation energy were derived for different Mo and C ratios and substrate bias. Film thickness was in the range 8-28 nm. Film resistivity varied from 3.55×10 -4 Ω m to 2.27×10 -6 Ω m when the Mo/C pulse ratio was increased from 0.05 to 0.4, with no substrate bias applied. With carbon-selective bias, the film resistivity was in the range of 4.59×10 -2 and 4.05 Ω m at a Mo/C pulse ratio of 0.05.The electrical activation energy decreased from 3.80×10 -2 to 3.36×10 -4 eV when the Mo/C pulse ratio was increased in the absence of bias, and from 0.19 to 0.14 eV for carbonselective bias conditions. The resistivity of the film shifts systematically with the amounts of Mo and upon application of substrate bias voltage. The intensity ratio of the Raman D-peak and G-peak (I D /I G ) correlated with the pre-exponential factor (σ 0 ) which included charge carrier density and density of states.

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“…A supersonic plasma flow can readily be made using a filtered cathodic arc plasma source [20]. 'Supersonic' refers to the fact that the ion streaming velocity exceeds the ion sound velocity, which results in a typical Mach number of 3-5 depending on material and other conditions [21].…”

Section: Methodsmentioning

confidence: 99%

Supersonic metal plasma impact on a surface: an optical investigation of the pre-surface region

Ni¹,

Anders²

2010

J. Phys. D: Appl. Phys.

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TitleSupersonic metal plasma impact on a surface: An optical investigation of the pre-surface region DISCLAIMERThis document was prepared as an account of work sponsored in part by the United States Government. While this document is believed to contain correct information, neither the United States Government nor any agency thereof, nor The Regents of the University of California, nor any of their employees, makes any warranty, express or implied, or assumes any legal responsibility for the accuracy, completeness, or usefulness of any information, apparatus, product, or process disclosed, or represents that its use would not infringe privately owned rights. Reference herein to any specific commercial product, process, or service by its trade name, trademark, manufacturer, or otherwise, does not necessarily constitute or imply its endorsement, AbstractAluminum plasma, produced in high vacuum by a pulsed, filtered cathodic arc plasma source, was directed onto a wall where if formed a coating. The accompanying "optical flare" known from the literature was visually observed, photographed, and spectroscopically investigated with appropriately high temporal (1 µs) and spatial (100 µm) resolution. Consistent with other observations using different techniques, it was found that the impact of the fully ionized plasma produces metal neutrals as well as desorbed gases, both of which interact with the incoming plasma. Most effectively are charge exchange collisions between doubly charged aluminum and neutral aluminum, which lead to a reduction of the flow of doubly charged before they reach the wall, and a reduction of neutrals as the move away from the surface. Those plasma-wall interactions are relevant for coating processes as well as for interpreting the plasma properties such as ion charge state distributions.

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Streaming metal plasma generation by vacuum arc plasma guns

Cited by 83 publications

References 5 publications

Time-resolved ion energy and charge state distributions in pulsed cathodic arc plasmas of Nb−Al cathodes in high vacuum

Time-resolved ion energy and charge state distributions in pulsed cathodic arc plasmas of Nb−Al cathodes in high vacuum

Electrical properties of a-C: Mo films produced by dual-cathode filtered cathodic arc plasma deposition

Supersonic metal plasma impact on a surface: an optical investigation of the pre-surface region

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