Stray-light implementation in optical proximity correction (OPC)

Abstract

It is suggested that stray-light (SL, also called flare, scattered light) impact can be compensated by modifying standard OPC method. Compared to traditional optical proximity effect caused by diffraction limit, stray light leads to extremely long range (~ 100 micrometer ~ 10 millimeter) proximity effect. Appropriate approximation is introduced for stray-light implemented OPC in such a large scale. This paper also addresses other practical problems in the stray-light OPC and presents how to solve the problems.