2023
DOI: 10.1039/d2tc04188j
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Strategic review on chemical vapor deposition technology-derived 2D material nanostructures for room-temperature gas sensors

Abstract: The significance of two-dimensional (2D) materials including graphene, and transition metal dichalcogenides has been escalating in gas sensor technology owing to detection of gases at room temperature (RT) and good...

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Cited by 13 publications
(7 citation statements)
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References 162 publications
(203 reference statements)
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“…This method involves the controlled deposition of gaseous precursors onto a substrate, where they undergo chemical reactions to form a thin film of the desired MOS. 89 The CVD process offers fine control over the film's composition, morphology, and crystallinity, enabling the fabrication of MOS films with tailored properties. By carefully adjusting process parameters such as temperature, pressure, precursor concentration, and gas flow rates, precise control over the growth kinetics and structure of the MOS film can be achieved.…”
Section: Fabrication Techniques For Mos-based E-nose Systemsmentioning
confidence: 99%
See 2 more Smart Citations
“…This method involves the controlled deposition of gaseous precursors onto a substrate, where they undergo chemical reactions to form a thin film of the desired MOS. 89 The CVD process offers fine control over the film's composition, morphology, and crystallinity, enabling the fabrication of MOS films with tailored properties. By carefully adjusting process parameters such as temperature, pressure, precursor concentration, and gas flow rates, precise control over the growth kinetics and structure of the MOS film can be achieved.…”
Section: Fabrication Techniques For Mos-based E-nose Systemsmentioning
confidence: 99%
“…90 The ability to deposit MOSs with controlled nanostructures and porous enhancers through CVD further enhances their gas sensing capabilities, as these features facilitate the adsorption and diffusion of gas molecules, leading to enhanced sensitivity and selectivity. 89 In the realm of gas sensing, MOS materials synthesized via CVD have demonstrated favorable performance due to their unique characteristics. The controlled deposition process enables the precise engineering of MOS films with high surface area-to-volume ratios, tailored crystal structures, and controlled defect densities.…”
Section: Fabrication Techniques For Mos-based E-nose Systemsmentioning
confidence: 99%
See 1 more Smart Citation
“…14 Low sensitivity, sluggish response and recovery time, and an inadequate recovery still remain difficult hurdles to overcome, despite the fact that several gas sensors based on metal oxides have proven the ability to sense at room temperature (RT). 15,16 Since the discovery of graphene, researchers have become interested in examining additional low-dimensional 2D semiconductor materials for various research elds. 17,18 In general, 2D TMDC nanomaterials have exciting characteristics including their high ratio of surface to volume, nonappearance of dangling bonds in their purest state, strong spin-orbit coupling contact, and high interaction capacity for the gas analyte adsorption.…”
Section: Introductionmentioning
confidence: 99%
“…Thanks to their large exposed surface area, short electron migration path, and high conductivity, nanomaterials with two-dimensional (2D) structures have been widely recognized as the consummate materials for preparing gas-sensitive substrates of resistivity-type sensors. For example, graphene, a single layer constructed by carbon atoms, has been researched deeply by theoretical and experimental means for its application potential in gas sensors since it was developed in 2004 . However, the inherent characteristic of a zero band gap limits the practical application of graphene, which drives bright scientists away toward new substitutes for high-qualified gas sensors .…”
Section: Introductionmentioning
confidence: 99%