Strain-induced material intermixing in multiple-stacked Ge/Si quantum dots grown by chemical vapor deposition

Chang, Wen‐Hao; Cheng, W.C.; Chou, A. T.; Hsu, T. M.; Chen, Pan-Shiu; Pei, Zingway; Lai, Li-Shyue

doi:10.1109/cleopr.2003.1277176

CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on Lasers and Electro-Optics (IEEE Cat. No.03TH8671)

DOI: 10.1109/cleopr.2003.1277176

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Strain-induced material intermixing in multiple-stacked Ge/Si quantum dots grown by chemical vapor deposition

Wen‐Hao Chang

W.C. Cheng

A. T. Chou

et al.

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Strain-induced material intermixing in multiple-stacked Ge/Si quantum dots grown by chemical vapor deposition

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