Strain Engineering of Nonlinear Nanoresonators from Hardening to Softening
Farbod Alijani,
Zichao Li,
Minxing Xu
et al.
Abstract:Although strain engineering and soft-clamping techniques for attaining high Q-factors in nanoresonators have received much attention, their impact on nonlinear dynamics is not fully understood. In this study, we show that nonlinearity of high-Q Si3N4 nanomechanical string resonators can be substantially tuned by support design. Through careful engineering of support geometries, we control both stress and mechanical nonlinearities, effectively tuning nonlinear stiffness over a factor more than 100. Our approach… Show more
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