“…The choice of the sacrificial layer is of paramount importance. Its crystal structure, chemical composition, surface morphology, and lattice parameter will affect the crystalline quality of the transferred film and the selective etching. − (La,Sr)MnO 3 (LSMO), SrRuO 3 (SRO), and Sr 3 Al 2 O 6 (SAO) are some of the sacrificial layers used to prepare epitaxial perovskite oxide membranes such as SrTiO 3 , BiFeO 3 , , BaTiO 3 , BaSnO 3 , SRO, , and LSMO or even nanocomposites BaTiO 3 –CoFe 2 O 4 . Among the above-mentioned sacrificial layers, SAO is especially suitable to prepare perovskite oxides, it can be easily dissolved in water, contributing to the sustainability of the process, and by scrupulous variation of its lattice constant via cation substitution permits easy lattice matching with the functional oxide and avoid further crack formation. ,, Nonetheless, the soft and open structure of SAO has a strong sensitivity to air humidity and can also facilitate cation interdiffusion during the high-temperature growth of the targeted complex oxide film. ,,− These characteristics can jeopardize the quality of the oxide membrane.…”