Stop‐Flow Lithography of Colloidal, Glass, and Silicon Microcomponents

Shepherd, Robert F.; Panda, Priyadarshi; Bao, Zhihao; Sandhage, Kenneth H.; Hatton, T. Alan; Lewis, Jennifer A.; Doyle, Patrick S.

doi:10.1002/adma.200801090

Cited by 89 publications

(67 citation statements)

References 51 publications

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“…e) SFL based synthesis of colloid granule containing microgears and f) sintered microgear formed from the process in e). Reproduced with permission from [70]. g) 3D particle with complex patches of fluorescent green and yellow formed using LRL [62].…”

Section: Non-spherical Particlesmentioning

confidence: 99%

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The Synthesis and Assembly of Polymeric Microparticles Using Microfluidics

2009

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The controlled synthesis of micrometer‐sized polymeric particles bearing features such as nonspherical shapes and spatially segregated chemical properties is becoming increasingly important. Such particles can enable fundamental studies on self‐assembly and suspension rheology, as well as be used in applications ranging from medical diagnostics to photonic devices. Microfluidics has recently emerged as a very promising route to the synthesis of such polymeric particles, providing fine control over particle shape, size, chemical anisotropy, porosity, and core/shell structure. This progress report summarizes microfluidic approaches to particle synthesis using both droplet‐ and flow‐lithography‐based methods, as well as particle assembly in microfluidic devices. The particles formed are classified according to their morphology, chemical anisotropy, and internal structure, and relevant examples are provided to illustrate each of these approaches. Emerging applications of the complex particles formed using these techniques and the outlook for such processes are discussed.

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Section: Non-spherical Particlesmentioning

confidence: 99%

“…7f). [70] Virus, such as Tobacco Mosaic Virus (TMV), have also been readily incorporated into bar-coded particles formed using SFL. [71] …”

Section: Composite Particlesmentioning

confidence: 99%

The Synthesis and Assembly of Polymeric Microparticles Using Microfluidics

2009

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“…In brief, we were able to successfully increase the throughput [cycle/min] of SFL by a factor of at least 2.04 and of up to 3.64 by reducing the cycle time to 440 ms, compared with a typical cycle time range of 900-1600 ms. 16,44,49 We performed the SFL experiment with a cycle time of 900 ms with a conventional PDMS chip as a conservative control (Table I). …”

Section: E Enhanced Productivity Of Stop Flow Lithography With Uv-cumentioning

confidence: 99%

Flow lithography in ultraviolet-curable polydimethylsiloxane microfluidic chips

Kim

Seo

et al. 2017

Biomicrofluidics

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Flow Lithography (FL) is the technique used for the synthesis of hydrogel microparticles with various complex shapes and distinct chemical compositions by combining microfluidics with photolithography. Although polydimethylsiloxane (PDMS) has been used most widely as almost the sole material for FL, PDMS microfluidic chips have limitations: (1) undesired shrinkage due to the thermal expansion of masters used for replica molding and (2) interfacial delamination between two thermally cured PDMS layers. Here, we propose the utilization of ultraviolet (UV)-curable PDMS (X-34-4184) for FL as an excellent alternative material of the conventional PDMS. Our proposed utilization of the UV-curable PDMS offers three key advantages, observed in our study: (1) UV-curable PDMS exhibited almost the same oxygen permeability as the conventional PDMS. (2) The almost complete absence of shrinkage facilitated the fabrication of more precise reverse duplication of microstructures. (3) UV-cured PDMS microfluidic chips were capable of much stronger interfacial bonding so that the burst pressure increased to $0.9 MPa. Owing to these benefits, we demonstrated a substantial improvement of productivity in synthesizing polyethylene glycol diacrylate microparticles via stop flow lithography, by applying a flow time (40 ms) an order of magnitude shorter. Our results suggest that UV-cured PDMS chips can be used as a general platform for various types of flow lithography and also be employed readily in other applications where very precise replication of structures on micro-or submicrometer scales and/or strong interfacial bonding are desirable. Published by AIP Publishing. [http://dx

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“…Stop-flow lithography (SFL) technique [1], which was first proposed by Professor Doyle's group, has been intensively used in the fabrication of various complex or multifunctional microstructures with applications that range from mechanical to biomedical engineering, such as synthesis of colloidal, glass, and silicon microcomponents [2,3], nonspherical superparamagnetic particles [4,5], cell-laden microgel particles [6,7], and multifunctional encoded particles for biomolecule analysis [8,9]. This technique combines the advantages of microscope projection photolithography and microfluidics to continuously form morphologically complex particles.…”

Section: Introductionmentioning

confidence: 99%

Stop-flow Lithography to Continuously Fabricate Microlens Structures Utilizing an Adjustable Three-Dimensional Mask

Huang

Lin

2014

Micromachines

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Stop-flow lithography (SFL) is a microfluidic-based particle synthesis method, in which photolithography with a two dimensional (2D) photomask is performed in situ within a microfluidic environment to fabricate multifunctional microstructures. Here, we modified the SFL technique by utilizing an adjustable electrostatic-force-modulated 3D (EFM-3D) mask to continuously fabricate microlens structures for high-throughput production. The adjustable EFM-3D mask contains a layer filled with a UV-absorbing liquid and transparent elastomer structures in the shape of microlenses between two conductive glass substrates. An acrylate oligomer stream is photopolymerized via the microscope projection photolithography, where the EFM-3D mask was set at the field-stop plane of the microscope, thus forming the microlens structures. The produced microlens structures flow downstream without adhesion to the polydimethysiloxane (PDMS) microchannel surfaces due to the existence of an oxygen-aided inhibition layer. Microlens structures with variations in curvature and aperture can be produced by changing objective magnifications, controlling the morphology of the EFM-3D mask through electrostatic force, and varying the concentration of UV-light absorption dyes. We have successfully demonstrated to produce microlens structures with an aperture ranging from 50 μm to 2 mm and the smallest focus spot size of 0.59 μm. Our proposed method allows one to fabricate microlens structures in a fast, simple and high-throughput mode for application in micro-optical systems. OPEN ACCESSMicromachines 2014, 5 668

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Stop‐Flow Lithography of Colloidal, Glass, and Silicon Microcomponents

Cited by 89 publications

References 51 publications

The Synthesis and Assembly of Polymeric Microparticles Using Microfluidics

The Synthesis and Assembly of Polymeric Microparticles Using Microfluidics

Flow lithography in ultraviolet-curable polydimethylsiloxane microfluidic chips

Stop-flow Lithography to Continuously Fabricate Microlens Structures Utilizing an Adjustable Three-Dimensional Mask

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