Stoichiometry issues in pulsed-laser deposition of alloys grown from multicomponent targets

Arnold, Craig B.; Aziz, Muhammad

doi:10.1007/s003399900182

Cited by 43 publications

(19 citation statements)

References 4 publications

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“…This can be due to a change in the density of the target and therefore its thermal conductivity, which depends on the impurity composition. 18,19 The data reported in Table I shows that the Gd concentration in the films is slightly different from that in the corresponding targets. It is known that the transfer ratio of the species from the target to the film depends on the type of the atoms.…”

Section: Resultsmentioning

confidence: 96%

Identifying the influence of the intrinsic defects in Gd-doped ZnO thin-films

Flemban

Sequeira

Zhang

et al. 2016

Journal of Applied Physics

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Gd-doped ZnO thin films were prepared using pulsed laser deposition at different oxygen pressures and varied Gd concentrations. The effects of oxygen deficiency-related defects on the Gd incorporation, optical and structural properties, were explored by studying the impact of oxygen pressure during deposition and post-growth thermal annealing in vacuum. Rutherford Backscattering Spectrometry revealed that the Gd concentration increases with increasing oxygen pressure for samples grown with the same Gd-doped ZnO target. Unexpectedly, the c-lattice parameter of the samples tends to decrease with increasing Gd concentration, suggesting that Gd-defect complexes play an important role in the structural properties. Using low-temperature photoluminescence (PL), Raman measurements and density functional theory calculations, we identified oxygen vacancies as the dominant intrinsic point defects. PL spectra show a defect band related to oxygen vacancies for samples grown at oxygen deficiency. V C 2016 AIP Publishing LLC.

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Section: Resultsmentioning

confidence: 96%

Identifying the influence of the intrinsic defects in Gd-doped ZnO thin-films

Flemban

Sequeira

Zhang

et al. 2016

Journal of Applied Physics

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“…It must be emphasized that the microstructure of the pellet material strongly affect the final film morphology and structural quality through the formation, distribution and density of particulates in the deposit [39][40][41][42]. In this respect, ablation by a single premixed multielemental pellet has significant limitations and drawbacks in target density, fixed concentration of dopant, inability to change in situ the doping conditions during the deposition process, differential scattering in the plume itself among species with very different masses that can induce incorrect film stoichiometry and non uniform dopant distribution as well as cluster or secondary phases of the dopant oxide in the oxygen background atmosphere.…”

Section: Introductionmentioning

confidence: 99%

Structural characterization of ultrathin Cr-doped ITO layers deposited by double-target pulsed laser ablation

Cesaria¹,

Caricato²,

Leggieri³

et al. 2011

J. Phys. D: Appl. Phys.

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In this paper we report on the growth and structural characterization of very thin (20 nm) Cr-doped ITO films, deposited at room temperature by double-target pulsed laser ablation on amorphous silica substrates. The role of Cr atoms in the ITO matrix is carefully investigated with increasing doping content by transmission electron microscopy (TEM). Selected-area electron diffraction, conventional bright field and dark field as well as high-resolution TEM analyses, and energy dispersive x-ray spectroscopy demonstrate that (i) crystallization features occur despite the low growth temperature and small thickness, (ii) no chromium or chromium oxide secondary phases are detectable, regardless of the film doping levels, (iii) the films crystallize as crystalline flakes forming large-angle grain boundaries; (iv) the observed flakes consist of crystalline planes with local bending of the crystal lattice. Thickness and compositional information about the films are obtained by Rutherford back-scattering spectrometry. Results are discussed by considering the combined effects of growth temperature, smaller ionic radius of the Cr cation compared with the trivalent In ion, doping level, film thickness, the double-target doping technique and peculiarities of the pulsed laser deposition method.

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“…Pits related to the ejection of particulates were also observed in the target surface. The appearance of the pits is mainly related to the density of the target [5]. The thermal conductivity is lower for the target and in this connection a local irregularity can quickly heat material up before transferring the energy to the rest of the target.…”

Section: Methodsmentioning

confidence: 99%

“…The thermal conductivity is lower for the target and in this connection a local irregularity can quickly heat material up before transferring the energy to the rest of the target. This causes a higher local temperature and results in an explosive effect and leads to the formation of a hole [5]. Changes in the chemical composition of the target were observed after ablation process.…”

Section: Methodsmentioning

confidence: 99%

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Nanostructured Thin Films β-Al-Mg Obtained Using PLD Technique

2010

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In this work, the pulsed laser deposition (PLD) technique was used to grow AlMg thin films from a β-Mg 2 Al 3 target with nominal composition: 39.09 at.% Mg and 60.91 at.% Al. The paper presents the study of β-Mg 2 Al 3 thin films deposited using the pulsed laser deposition technique. AlMg thin films were prepared on Si (400) substrates and deposited by means of using a QS-Nd:YAG laser (λ = 266, 355 nm). Samples were prepared with laser fluence (1.1 J/cm 2 and 1.6 J/cm 2 ) and at two different substrate (Si) temperatures (25 • C and 200• C). The target possessed columnar structure and changes in chemical composition took place as a result of the influence of the laser irradiation. Investigations focused on structure and chemical composition showed that the films generally had nanocrystalline structure and that the quantity of Al and Mg varied in the films.

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Stoichiometry issues in pulsed-laser deposition of alloys grown from multicomponent targets

Cited by 43 publications

References 4 publications

Identifying the influence of the intrinsic defects in Gd-doped ZnO thin-films

Identifying the influence of the intrinsic defects in Gd-doped ZnO thin-films

Structural characterization of ultrathin Cr-doped ITO layers deposited by double-target pulsed laser ablation

Nanostructured Thin Films β-Al-Mg Obtained Using PLD Technique

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