Stoichiometry Dependence of Physical and Electrochemical Properties of the SnOx Film Anodes Deposited by Pulse DC Magnetron Sputtering

Abstract

A batch of Sn oxides was fabricated by pulse direct current reactive magnetron sputtering (pDC−RMS) using different Ar/O2 flow ratios at 0.3 Pa; the influence of stoichiometry on the physical and electrochemical properties of the films was evaluated by the characterization of scanning electron microscope (SEM), X-ray diffraction (XRD), X-ray reflection (XRR), X-ray photoelectron spectroscopy (XPS) and more. The results were as follows. First, the film surface transitioned from a particle morphology (roughness of 50.0 nm) to a smooth state (roughness of 3.7 nm) when Ar/O2 flow ratios changed from 30/0 to 23/7; second, all SnOx films were in an amorphous state, some samples deposited with low O2 flow ratios (≤2 sccm) still included metallic Sn grains. Therefore, the stoichiometry of SnOx calculated by XPS spectra increased linearly from SnO0.0.08 to SnO1.71 as the O2 flow ratios increased, and the oxidation degree was further calibrated by the average valence method and SnO2 standard material. Finally, the electrochemical performance was confirmed to be improved with the increase in oxidation degree (x) in SnOx, and the SnO1.71 film deposited with Ar/O2 = 23/7 possessed the best cycle performance, reversible capacity of 396.1 mAh/g and a capacity retention ratio of 75.4% after 50 cycles at a constant current density of 44 μA/cm2.

Influence of Co Transplantation SnO2 Nano Film on the Structural and Optical Properties Using Radio Frequency Magnetron Sputtering

“…Each tin atom is attached or bound to six oxygen particles at the edges of a customary octahedron, and each oxygen atom is encompassed by three tin particles [2]. Tin dioxide SnO 2 -based thin layers have been generally contemplated in light of the fact that they are steady towards environmental conditions, artificially inactive and precisely hard and they can oppose high temperatures [3]. Notwithstanding their applications as optical windows for the sun-based range [4], delicate switches [5], computerized shows [6], electro chromic shows [7] and gas sensors [8].…”