Stoichiometry and impurities in sputtered alumina films on copper

Vuoristo, Petri; Mäntylä, T.; Kettunen, P.; Lappalainen, Reijo

doi:10.1016/0040-6090(91)90071-5

Cited by 40 publications

(23 citation statements)

References 35 publications

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“…This corresponds to an O : A1 ratio of 2. A similar oxygen excess was reported by [5] The AES crater edge line scan of the multilayer is shown in Fig. 5.…”

Section: Results and Discussion Of The Aes Investigationssupporting

confidence: 77%

Combined EPMA and AES depth profiling of a multilayer Ti-Al-O-N coating

et al. 1994

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Abstract. In order to compare thin-film electron probe microanalysis (EPMA) and Auger electron spectroscopy (AES) regarding reliability in quantifying chemical compositions of Ti-A1-O-N coatings with depth, a multilayer was prepared on a silicon wafer by using reactive ionized cluster beam deposition technique. Within a total thickness of about 25 nm the composition of the multilayer varied step by step from Ti-A1-O-N at the bottom to A1-O at the top. AES and, as an innovation, EPMA crater edge profiling was applied to measure the composition with depth. For quantification special thin-film EPMA techniques based on Monte Carlo simulations were applied. The chemical binding states of A1 and Ti with depth were analysed using a high resolution energy analyser (MAC 3) for the AES investigations working in the direct mode. According to the deposition procedure the concentration profiles of the components varied with depth for both AES and EPMA measurements. AES provided a better depth resolution than EPMA. To get a true calibration of the depth scale an in-situ measurement method like an optical interferometry will be required. Assuming that the relative sensitivity factors are available AES depth profiling delivers concentration profiles with good accuracy. The new EPMA application provided quantitative depth profiles concerning concentration and coverage. For EPMA crater edge profiling the coating needs to be deposited on a foreign substrate because depth distributions of elements being present in both the layer and the substrate cannot be resolved.The combination of AES-depth profiling with EPMA crater edge profiling techniques is a powerful tool to analyse heterostructures quantitatively.

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“…This corresponds to an O : A1 ratio of 2. A similar oxygen excess was reported by [5] The AES crater edge line scan of the multilayer is shown in Fig. 5.…”

Section: Results and Discussion Of The Aes Investigationssupporting

confidence: 77%

Combined EPMA and AES depth profiling of a multilayer Ti-Al-O-N coating

et al. 1994

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“…64 Finally, the investigations of the chemical composition of the coatings were completed with a depth profiling of the H content. The H concentration was determined by means NRA of the H( The relative quantum efficiency of 10 B 4 C coatings was evaluated by measurements at the ToF-reflectometer REFSANS.…”

Section: B Depth Profile Investigations Of Boron Carbide Coatingsmentioning

confidence: 99%

Boron carbide coatings for neutron detection probed by x-rays, ions, and neutrons to determine thin film quality

Nowak

Störmer

Becker

et al. 2015

Journal of Applied Physics

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Boron carbide coatings for neutron detection probed by x-rays, ions, and neutrons to determine thin film quality He and the associated tremendous increase of its price, the supply of large neutron detection systems with 3 He becomes unaffordable. Alternative neutron detection concepts, therefore, have been invented based on solid 10 B converters. These concepts require development in thin film deposition technique regarding high adhesion, thickness uniformity and chemical purity of the converter coating on large area substrates. We report on the sputter deposition of highly uniform large-area 10 B 4 C coatings of up to 2 lm thickness with a thickness deviation below 4% using the Helmholtz-Zentrum Geesthacht large area sputtering system. The 10 B 4 C coatings are x-ray amorphous and highly adhesive to the substrate. Material analysis by means of X-ray-Photoelectron Spectroscopy, Secondary-Ion-Mass-Spectrometry, and RutherfordBack-Scattering (RBS) revealed low impurities concentration in the coatings. The isotope composition determined by Secondary-Ion-Mass-Spectrometry, RBS, and inelastic nuclear reaction analysis of the converter coatings evidences almost identical 10 B isotope contents in the sputter target and in the deposited coating. Neutron conversion and detection test measurements with variable irradiation geometry of the converter coating demonstrate an average relative quantum efficiency ranging from 65% to 90% for cold neutrons as compared to a black 3 He-monitor. Thus, these converter coatings contribute to the development of 3 He-free prototype detectors based on neutron grazing incidence. Transferring the developed coating process to an industrial scale sputtering system can make alternative 3 He-free converter elements available for large area neutron detection systems.

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“…EXPERIMENTAL PROCEDURE tures up to 800 ЊC to 900 ЊC. [1][2][3][4][5][6][7][8][9] Published research shows A. Materials that the hardness of the Cr 3 C 2 -NiCr coating slightly decreased only at temperatures below 600 ЊC and exceeded Nanostructured and conventional Cr 3 C 2 -NiCr (Dialloy 600 DPH 300 at 800 ЊC.…”

Section: Introductionmentioning

confidence: 99%

“…tion of the coatings at temperatures below 450 ЊC to 530 ЊC. [1,2] On the other hand, the Cr 3 C 2 -NiCr system coatings can be used in corrosive environments at service tempera-II. EXPERIMENTAL PROCEDURE tures up to 800 ЊC to 900 ЊC.…”

Section: Introductionmentioning

confidence: 99%

Synthesis of nanostructured Cr3C2-25(Ni20Cr) coatings

Ice

Lavernia

2000

Metall Mater Trans A

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On the basis of the nanocrystalline Cr 3 C 2 -25 (Ni20Cr) feedstock powders produced by mechanical milling, a nanostructured coating has been synthesized using high velocity oxygen fuel (HVOF) thermal spraying. The properties of the nanostructured coating were compared to those of the conventional coating of the same composition using scanning electron microscope (SEM), transmission electron microscope (TEM), and microhardness tests. The nanostructured Cr 3 C 2 -25 (Ni20Cr) coating synthesized in this study had an average carbide particle size of 24 nm. Discontinuous elongated amorphous phases were observed in the nanostructured coating. The conventional Cr 3 C 2 -25 (Ni20Cr) coatings produced using blended elemental powders exhibited an inhomogeneous microstructure. The observed homogeneity of the nanostructured coating is attributed, in part, to the microstructural improvement of the starting powder. The nanostructured Cr 3 C 2 -25 (Ni20Cr) coating yielded an average microhardness value of 1020 DPH 300 , which corresponds to a 20 pct increase in microhardness over that of the conventional coating. The nanostructured Cr 3 C 2 -25 (Ni20Cr) coating also exhibited a higher apparent fracture toughness relative to that of the conventional coating. The apparent mechanical property improvements in the nanostructured coating were thought to result from the uniformity of the microstructure and the high performance associated with a nanostructured structure. In addition, the mechanism that is present during the milling of a system containing nondeformable particles is discussed in light of the TEM observations.

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Stoichiometry and impurities in sputtered alumina films on copper

Cited by 40 publications

References 35 publications

Combined EPMA and AES depth profiling of a multilayer Ti-Al-O-N coating

Combined EPMA and AES depth profiling of a multilayer Ti-Al-O-N coating

Boron carbide coatings for neutron detection probed by x-rays, ions, and neutrons to determine thin film quality

Synthesis of nanostructured Cr3C2-25(Ni20Cr) coatings

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