Stochastic mixing in microfluidics integrable in bioanalytical systems

Fekete, Zoltán; Holczer, Eszter; Tóth, Eszter L.; Iván, Kristóf; Fürjes, Péter

doi:10.1016/j.proeng.2011.12.303

Cited by 1 publication

(1 citation statement)

References 3 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…They are required for developing micro-fluidic devices such as reactors, mixers, ejectors, cell selectors, and others [11][12][13][14]. The patterning is also required for developing optical micro-components such as lens and prism arrays, and others [15][16][17][18][19].…”

Section: Introductionmentioning

confidence: 99%

Improvement of Patterning Homogeneity in a Field of Projection Exposure System Using a Gradient-Index Lens Array

Horiuchi

Sato

Kobayashi

2017

J. Photopol. Sci. Technol.

View full text Add to dashboard Cite

Pattern width homogeneity in an exposure field of gradient-index (GRIN) lens array was greatly improved by changing the sub-scan method for averaging the pattern widths. By investigating the pattern width distribution in the exposure field, it was clarified that the parts, where the printed patterns were degraded and pattern widths were notably changed, appeared as striped lines. It was supposed that the striped abnormal pattern-width change was caused by the extra exposures for the times when the sub-scan stage was stopped at both the sub-scan ends for turning the scan direction. For this reason, sub-scan length was vastly extended, and the sub-scan stage was turned at the both ends after all the patterns on a reticle passed over the actually used parts of a GRIN lens array. By this method, no patterns were exposed and projected on a wafer while the sub-scan stage was stopped for turning at the both ends. As a result, 15-µm L&S patterns were almost homogeneously printed in the exposure field within a variation range of ±6%.

show abstract