Stimulated Emission Depletion Lithography with Mercapto-Functional Polymers

Buchegger, Bianca; Kreutzer, Johannes; Plochberger, Birgit; Wollhofen, Richard; Sivun, Dmitry; Jacak, Jaroslaw; Schütz, Gerhard J.; Schubert, Ulrich S.; Klar, Thomas A.

doi:10.1021/acsnano.5b05863

Cited by 46 publications

(32 citation statements)

References 43 publications

(74 reference statements)

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“…[16][17][18] Polarization effects in laser fabrication in 2D and 3D geometries are now explored in polymerization by DLW. [19][20][21] In addition, stimulated-emission-depletion control of 3D focal volume, [22][23][24] orientation of the deposition of self-organized materials, [ 25,26 ] the melting and oxidation of thin fi lms, [ 27 ] laser ablation, [ 28,29 ] …”

Section: Doi: 101002/adom201600155mentioning

confidence: 99%

Nanoscale Precision of 3D Polymerization via Polarization Control

Rekštytė

Jonavičius

Gailevičius

et al. 2016

Advanced Optical Materials

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COMMUNICATIONand as self-organized nanopatterns induced on a surface, [ 30 ] are among other polarization-related phenomena demonstrated recently.The infl uence of beam polarization orientation on laser processing has been thoroughly studied in the cases of conductive and dielectric solid targets. [ 31,32 ] There are known effects of polarization on the scalar parameters of laser-matter interaction, such as absorption coeffi cient and ionization rate. [33][34][35][36] It is also known that heat conduction fl ux (vector) in plasma might be dependent on the direction of the imposed fi eld. [ 37 ] In what follows, these effects are considered in succession: (i) accumulation from multiple pulses, (ii) effects of polarization under high-numerical aperture (NA) focusing, and (iii) the infl uence of the external high-frequency electric fi eld on electronic heat conduction. The latter contribution has not yet been considered in laser fabrication under tight focusing. All these photomodifi cation mechanisms occur simultaneously and affect polymerization, which takes approximately a millisecond for common photoresists [ 38 ] at a >90% voxel overlap at typical writing velocity of 100 µm s -1 for widespread laser 3D nanolithography. [ 39 ] In this paper, a systematic analysis via modeling and experiments is presented in order to reveal polarization effects, their infl uence on the feature size (resolution), and the coupling between thermal gradient and polarization in DLW.To study and demonstrate the polarization effects, 3D suspended resolution bridges at various angles, α , between the linear polarization and scanning direction were fabricated on a glass substrate ( Figure 1 inset in (a); see details in the Experimental Section). The line-width difference was 10%-20% (varying exposure) under typical polymerization conditions for the linearly polarized pulses. The largest width of a 3D bridge was observed when the scan direction was perpendicular to the orientation of linear polarization, α = π / 2 ( E ⊥ v s ). The heightto-width ratio of the suspended lines was dependent on the orientation of linear polarization and changed between 3.07 and 3.44; self-focusing was not present under our experimental conditions. [ 40 ] Detailed analysis of polarization, threshold, and heat accumulation effects, which are all important, are discussed next.For the experimental conditions used, the focal spot diameter (at 1/ e 2 ) can be calculated as d f = 1.22 λ /NA = 898 nm assuming, for simplicity, a Gaussian intensity profi le. However, at such tight focusing it is necessary to use the vectorial Debye theory (specifi cs [ 41 ] can be found in Section A, Supporting Information), which predicts an ellipsoidal focal spot with two lateral cross sections: W l = 790 nm and W s = 572 nm for long and short cross sections, respectively (or 500 and 360 nm at full width at half maximum (FWHM)) for the actual experimental

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Section: Doi: 101002/adom201600155mentioning

confidence: 99%

Nanoscale Precision of 3D Polymerization via Polarization Control

Rekštytė

Jonavičius

Gailevičius

et al. 2016

Advanced Optical Materials

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“…11,12 These microscopy tools have in turn given rise to new frontiers in super-resolution optical lithography; far eld optics now enable direct writing with nanoscale resolution. [13][14][15][16][17][18][19] While promising, almost all demonstrations of superresolution optical lithography have been in serial, point-bypoint writing formats. 20,21 Many of these material systems necessarily require a focused beam of high intensity, due to the high threshold for depletion; such techniques are thus unable to achieve super resolution interference lithography, i.e.…”

Section: Introductionmentioning

confidence: 99%

Super-resolution interference lithography enabled by non-equilibrium kinetics of photochromic monolayers

et al. 2019

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“…Heat accumulation at focus defined by repetition rate and scan speed is used to increase productivity of 3D polymerization and makes thermal issues very important. Polarization effects in laser fabrication in 2D and 3D geometries are now explored in polymerization by DLW 13,14 and using stimulated-emission-depletion (STED) control of 3D focal volume, 15,16 orientation of deposition of self-organized materials, 17 melting and oxidation of thin films, 18 laser ablation, 19,20 and as self-organized nano-patterns formed on surface by ablation. 21 At tight focusing into a spot (volume) comparable in cross section with the wavelength of light, polarization effects become dominant.…”

Section: Introductionmentioning

confidence: 99%

Femtosecond pulsed light polarization induced effects in direct laser writing 3D nanolithography

et al. 2016

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We demonstrate how the coupling between (i) polarization of the writing laser beam, (ii) tight focusing and (iii) heat conduction affects the size, shape and absorption in the laser-affected area and therefore the polymerization process. It is possible to control the sizes of 3D laser-produced structure at the scale of several nanometers. Specifically we were able to tune the aspect ratio of 3D suspended line up to 20% in hybrid SZ2080 resist. The focal spot of tightly focused linearly polarized beam has an elliptical form with the long axis in the field direction. It is shown here that this effect is enhanced by increase in the electronic heat conduction when polarization coincide with temperature gradient along with the absorption. Overlapping of three effects (iiii) results in the difference of several tens of nanometers between two axes of the focal ellipse. Narrow line appears when polarization and scan direction coincide, while the wide line is produced when these directions are perpendicular to each other. The effect scales with the laser intensity giving a possibility to control the width of the structure on nanometer scale as demonstrated experimentally in this work. These effects are of general nature and can be observed in any laser-matter interaction experiments where plasma produced by using tight focusing of linear-polarized light.

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Stimulated Emission Depletion Lithography with Mercapto-Functional Polymers

Cited by 46 publications

References 43 publications

Nanoscale Precision of 3D Polymerization via Polarization Control

Nanoscale Precision of 3D Polymerization via Polarization Control

Super-resolution interference lithography enabled by non-equilibrium kinetics of photochromic monolayers

Femtosecond pulsed light polarization induced effects in direct laser writing 3D nanolithography

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