Stiction in Low Humidity Environment

Sammoura, Firas; Sparks, Andrew W.; Sawyer, William D.; Bhagavat, Milind; Judy, Michael W.; Yang, Kai

doi:10.1109/memsys.2009.4805326

Cited by 5 publications

(2 citation statements)

References 7 publications

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“…A breach in hermiticity can change the gas content and pressure surrounding the MEMS device which in turns leads to performance shifts. In our previous work [1], we have found that any slight modification in the water content of the capped MEMS devices can lead to failure due to stiction. In addition, it is reported that the performance of RF MEMS switches is deleteriously affected when the devices are non-hermitically sealed due to the effect of humidity and small particles [2].…”

Section: Introductionmentioning

confidence: 98%

“…Ensuring hermiticity is a mandatory requirement for most encapsulated MEMS devices including automotive-grade sensors. Hermiticity failures emanates from two major sources: (1) Defects in the bonding material and (2) Cracks due to stress. A breach in hermiticity can change the gas content and pressure surrounding the MEMS device which in turns leads to performance shifts.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Real-Time Hermiticity Detection Using Titanium Dioxide Thin Film Resistors as Both Oxygen and Pressure Sensors

Sammoura¹,

Yang²

2010

2010 Solid-State, Actuators, and Microsystems Workshop Technical Digest

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In-situ hermiticity detection using Titanium dioxide (TiO 2 ) thin film resistors has been investigated for the first time. Titanium dioxide is widely used as an oxygen sensor, with accurate partial pressure reading at high temperatures. In addition to being oxygen sensitive at room temperature, TiO 2 thin film resistors were found to be excellent pressure gauges at typical bonding pressures in the range of 1 Torr to 760 Torr. Combining the pressure sensitivity with the oxygen selectivity, Titanium dioxide thin film resistors constitute perfect hermiticity solutions for MEMS devices capped in an oxygen deficient environment at sub-atmospheric pressures. This unprecedented demonstration opens up new opportunities for monitoring real-time hermiticity in packaged MEMS devices, understanding the various failure modes during operation, and implementing the necessary diagnostic solutions.

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Section: Introductionmentioning

confidence: 98%

Section: Introductionmentioning

confidence: 99%