Step Coverage Predictions Using Combined Reactor Scale and Feature Scale Models for Blanket Tungsten LPCVD

The Combination of Equipment Scale and Feature ScaleModels for Chemical Vapor Deposition Via aHomogenization Technique

“…Mathematically, the problem is given as a reactiondiffusion equation with associated boundary conditions. After a suitable non-dimensionalization procedure, the dimensionless concentration u(x, y) has to satisfy the differential equation bu 0-divxy(D(u,x, y) Vxyu) + Rg(u,x, y) (1) as well as the boundary conditions -e]"(-DVxyu)…”

“…To model chemical vapor deposition (CVD) in single wafer reactors, attempts have been made at linking reactor scale models (RSM) and feature scale models (FSM) to obtain realistic simulation results [1]. In these studies, reactor scale predictions have been used as inputs to feature scale models, but no information was fed back from the feature scale to the reactor scale.…”

Multiscale modeling in chemical vapor deposition processes: Coupling reactor scale with feature scale computations

“…The first effort to link the RSM and the FSM is found in the work of Hasper et al (1991). The next significant work on this subject was that of Cale et al (1993). Until then there was only a link and not coupling of the two scales.…”

Προσομοίωση Πολλαπλών Χωρικών Κλιμάκων Και Συστημική Ανάλυση Διεργασιών Χημικής Απόθεσης Από Ατμό

“…Ζ πξψηε πξνζπάζεηα ζχλδεζεο ηεο καθξν κε ηε κηθξν-θιίκαθα ζπλαληάηαη, ζηηο αξρέο ηεο δεθαεηίαο ηνπ "90, ζηελ εξγαζία ηνπ Hasper θαη ησλ ζπλεξγαηψλ ηνπ . Ζ επφκελε ζεκαληηθή εξγαζία, ζην ίδην αληηθείκελν, ήηαλ απηή ηνπ Cale θαη ησλ ζπλεξγαηψλ ηνπ (Cale et al 1993 Πξφζθαηα, ζε κηα ζεηξά απφ εξγαζίεο (Cavallotti et al 2004, Cavallotti et al 2005a, Cavallotti et al 2005b (Simon 1991, Shadid et al 1997, ηνλ ειεθηξνκαγλεηηζκφ (Weile & Michielssen 1997) θαη ηε ζηαηηθή αλάιπζε (Bitzarakis et al 1997) έσο ηνπο ππνινγηζκνχο κνξηαθήο δπλακηθήο (Murty & Okunbor 1999). Αλ θαη ππάξρνπλ εξγαζίεο (Nakano et al 2001, Drews et al 2005 Σε λαλν-θιίκαθα απνηειεί ε κνξθνινγία ηνπ απνηηζέκελνπ πκελίνπ, ηάμεο nm.…”