Status of the silicon pore optics technology

Collon, Maximilien J.; Vacanti, Giuseppe; Barrière, Nicolas M.; Landgraf, Boris; Günther, Ramses; Vervest, Mark; Voruz, Luc; Verhoeckx, Sjoerd; Babić, Ljubiša; Keek, L.; Girou, David; Okma, Ben; Hauser, Enrico; Beijersbergen, Marco W.; Bavdaz, Marcos; Wille, Eric; Fransen, Sebastiaan; Shortt, Brian; Ferreira, Ivo; Haneveld, Jeroen; Koelewijn, Arenda; Start, Ronald; Wijnperle, Maurice; Lankwarden, Jan-Joost; Baren, Coen van; Hieltjes, Paul; Herder, J. W. den; Müller, P.; Handick, Evelyn; Krumrey, Michael; Bradshaw, Miranda; Burwitz, V.; Pareschi, G.; Massahi, Sonny; Svendsen, Sara; Ferreira, Desiree Della Monica; Christensen, Finn Erland; Valsecchi, Giuseppe; Oliver, Paul; Chequer, Ian; Ball, Kevin

doi:10.1117/12.2530696

Cited by 17 publications

(11 citation statements)

References 20 publications

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“…The Advanced Telescope for High ENergy Astrophysics (Athena) telescope is selected as the next large class X-ray observatory of the European Space Agency (ESA) 1 . The mission will feature a single X-ray telescope with a focal length of 12 m and a mirror design based on the silicon pore optics (SPO) technology [2][3][4] . Achieving the science cases for Athena requires excellent X-ray reflective mirror coatings.…”

Section: Introductionmentioning

confidence: 99%

Status of the Ir and Ir/SiC coating development for the Athena optics

Svendsen¹,

Ferreira²,

Massahi³

et al. 2020

Space Telescopes and Instrumentation 2020: Ultraviolet to Gamma Ray

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The mirror coatings for the Athena X-ray telescope assumes Ir/SiC bilayer thin films as a baseline design.Adding the soft overcoat to the Ir X-ray mirror coatings for the Athena optics is used to improve the low energy performance necessary to achieve the telescope effective area requirements. The Athena mirror is based on silicon pore optics technology, for which the manufacturing process involves a sequence of wet chemical and thermal post-coating treatments of the mirror plates. Establishing compatibility of the thin film material candidates following exposure to these processes is critical for the Athena mission since the specific coating quality will influence the performance of the X-ray telescope. We present an investigation of Ir and Ir/SiC thin films exposed to post-coating treatments based on coatings produced at DTU Space. The current status of the chemical procedures is presented with representative coatings from the Athena-dedicated coating facility.

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Section: Introductionmentioning

confidence: 99%

Status of the Ir and Ir/SiC coating development for the Athena optics

Svendsen¹,

Ferreira²,

Massahi³

et al. 2020

Space Telescopes and Instrumentation 2020: Ultraviolet to Gamma Ray

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“…Включение в интерфейс азота защищает от проникновения примесей, и радиационная стойкость диодов возрастает на несколько порядков. Однако, пассивирующее окно вызывает поверхностную рекомбинацию при получении большой дозы ионизирующего излучения, что приводит к снижению квантового выхода [12,13]. Результаты исследований стабиль-Метрологические исследования характеристик многослойных поверхностных покрытий с использованием синхротронного излучения ности фотодиодов с использованием синхротронного излучения электронных накопительных кольцах «Сибирь-1» и MLS показали, что при суммарной энерге-тической экспозиции 500 МДж/м 2 в течение нескольких часов изменение абсолютной спектральной чувствительности при нормировании сигнала фотодиода на ток электронного пучка не превышало десятых долей процента.…”

Section: Research Articleunclassified

Metrological studies of the characteristics of multilayer surface coatings using synchrotron radiation

Сигов

Minaeva

Anevskii

et al. 2021

Rossijskij tehnologičeskij žurnal

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The investigations of multilayer surface nanostructures characteristics was performed with synchrotron radiation sources, characterized by an intensive, calculated continuum. It plays an important role in nanoelectronics metrological base. The main research were carried out at electron storage rings «Siberia-1» (Kurchatov Institute) and MLS (PTB, Berlin) with low electron energy, in a wide wavelength range, including visible range, AUV, VU, EUV and to exclude the X-ray radiation influence. The methods of the radiometers, photodiodes, filters and multilayer mirrors characteristics measurements are based on the synchrotron radiation absolute spectral characteristics and accelerated electrons number variation. The metrological investigations with synchrotron radiation was concentrated on: – absolute spectral responsivety of silicon photodiodes with multilayer filters for integral radiometers applications; – spectral transmittances of surface layers of photodiodes in the extreme ultraviolet region; – spectral reflectance coefficient of superlattice. The characteristics of photodiodes and filters on a synchrotron radiation source are measured using a monochromator and a reference detector. The use of a synchrotron radiation channel makes it possible to study the spectral transmittance of thin films and multilayer structures formed in the in situ mode. To form multilayer nanostructures directly on the receiving surface of photodetectors, an ion-plasma sputtering module is used. The optical scheme of the channel provides for the possibility of using monochromators of grazing incidence for the range of photon energies from 25 to 100 ev and normal incidence for the range of photon energies from 4 to 25 ev. At a photon energy of 40 ev, the absolute spectral sensitivity was 70 ma / W for a photodiode with a surface multilayer filter applied. To develop an experimental technique for measuring the spectral reflection coefficient of multilayer mirrors, and to create standard samples, the Mo/Si system was studied. Computer modeling of multi-layer coatings allows us to calculate the optical characteristics of superlattices in the extreme ultraviolet region. The obtained results of measurements of the spectral reflection coefficient of a multilayer coating in the photon energy range of 65–100 ev indicate a resonance reflection character with a max-imum at an energy of 83.5 ev and an energy width at a half-height of about 6.5 ev. The working wave-length of the reflecting mirror corresponds to the calculated one, which confirms the effectiveness of the adopted model.

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“…This translates into about 300 m 2 of superpolished mirror surface and requires a new mirror technology to break the general correlation stated above, to make a light-weight yet stiff mirror, in order to achieve the desired optical performance. This technology is being developed by ESA [5], cosine and its partners, both in industry and academia and is called Silicon Pore Optics (SPO) [6].…”

Section: Introductionmentioning

confidence: 99%

X-ray mirror development and production for the Athena telescope

Collon¹,

Babić

Barrière

et al. 2021

International Conference on Space Optics — ICSO 2020

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Athena will be the largest space-based x-ray telescope to be flown by the European Space Agency: its large 2.6 m diameter lens will use a revolutionary new modular technology, Silicon Pore Optics (SPO). The lens will consist of several hundreds of smaller x-ray lenslets, called mirror modules, which each consist of about 70 mirror pairs. Those mirror modules are arranged in circles in a large optics structure and will focus x-ray photons with an energy of 0.5 to 10 keV at a distance of 12 m onto the detectors of Athena. The point-spread function (PSF) of the optic shall achieve a halfenergy width (HEW) of 5" at an energy of 1 keV, with an effective area of about 1.4 m 2 , corresponding to several hundred m 2 of super-polished mirrors with a roughness of about 0.3 nm and a thickness of only 150 μm. SPO using the highest grade double-side polished 300 mm wafers commercially available, have been invented to enable such telescopes. SPO allows the cost-effective production of high-resolution, large area, x-ray optics, by using all the advantages that mono-crystalline silicon and the mass production processes of the semi-conductor industry provide. SPO has also shown to be a versatile technology that can be further developed for gamma-ray optics, medical applications and for material research. This paper will present the status of the technology and of the mass production capabilities, show latest performance results and discuss the next steps in the development.

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Status of the silicon pore optics technology

Cited by 17 publications

References 20 publications

Status of the Ir and Ir/SiC coating development for the Athena optics

Status of the Ir and Ir/SiC coating development for the Athena optics

Metrological studies of the characteristics of multilayer surface coatings using synchrotron radiation

X-ray mirror development and production for the Athena telescope

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