Status and challenges in electrical diagnostics of processing plasmas

Stamate, Eugen

doi:10.1016/j.surfcoat.2014.09.070

Cited by 25 publications

(28 citation statements)

References 63 publications

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“…While surface characterization techniques such as XPS, TOF-SIMS and XRD allows one to perform spatially resolved analytical investigations, this possibility alone cannot unveil the growth mechanism due to the need for coupling with spatially resolved plasma diagnostics. While electrostatic probes are subject to contamination and electromagnetic field distortions [48,49], optical diagnostics need complex 2D laser-induced fluorescence setups [50] to reveal the needed information.…”

Section: Discussionmentioning

confidence: 99%

Spatially Resolved Optoelectronic Properties of Al-Doped Zinc Oxide Thin Films Deposited by Radio-Frequency Magnetron Plasma Sputtering Without Substrate Heating

Stamate

2019

Nanomaterials

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Transparent and conducting thin films were deposited on soda lime glass by RF magnetron sputtering without intentional substrate heating using an aluminum doped zinc oxide target of 2 inch in diameter. The sheet resistance, film thickness, resistivity, averaged transmittance and energy band gaps were measured with 2 mm spatial resolution for different target-to-substrate distances, discharge pressures and powers. Hall mobility, carrier concentration, SEM and XRD were performed with a 3 mm spatial resolution. The results reveal a very narrow range of parameters that can lead to reasonable resistivity values while the transmittance is much less sensitive and less correlated with the already well-documented negative effects caused by a higher concentration of oxygen negative ions and atomic oxygen at the erosion tracks. A possible route to improve the thin film properties requires the need to reduce the oxygen negative ion energy and investigate the growth mechanism in correlation with spatial distribution of thin film properties and plasma parameters.

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Section: Discussionmentioning

confidence: 99%

Spatially Resolved Optoelectronic Properties of Al-Doped Zinc Oxide Thin Films Deposited by Radio-Frequency Magnetron Plasma Sputtering Without Substrate Heating

Stamate

2019

Nanomaterials

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“…A home-made Langmuir probe [14], which was calibrated by an AIC1000, also was used to verify the presence of negative ions around the stainless steel pins. As the AIC1000 anion detector is a major tool to verify and monitor the negative ions in the outlet of reactor, the probe as the secondary means for roughly monitoring proof of the negative ions presence around pins should be essentially valid although potential errors due to existence of reactive gases might exist [15]. A thermostar GSD320 mass spectrometer was connected to the outlet of the reactor.…”

Section: Methodsmentioning

confidence: 99%

A novel method of production of ethanol by carbon dioxide with steam

Guo

Xia

et al. 2015

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“…The current-voltage characteristic of the cylindrical Langmuir probe can be used to obtain an indirect measurement of the parameters that characterize the plasma in the zone of the discharge where it is placed. The plasma potential, V plasma , the floating potential, V f loat , and the electron energy distribution function, EEDF, can be measured [1,2,4,6,26,[34][35][36][37][38][39][40][41]. Regarding the measured EEDF, it is checked that, in every measurement, the EEDF can be considered as following the distribution of Maxwell-Boltzmann [1,4,6,26,28], which is essential since the assumption of a Maxwellian EEDF is made in both radial and orbital theories.…”

Section: Experimental Setup and Measurement Methodsmentioning

confidence: 99%

Influence of the Ion Mass in the Radial to Orbital Transition in Weakly Collisional Low-Pressure Plasmas Using Cylindrical Langmuir Probes

et al. 2020

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This paper presents an experimentally observed transition from the validity of the radial theories to the validity of the orbital theories that model the ion current collected by a cylindrical Langmuir probe immersed in low-pressure, low-temperature helium plasma when it is negatively biased with respect to the plasma potential, as a function of the positive ion-neutral collision mean free path to the Debye length ratio Λ=λ+/λD. The study has been also conducted on argon and neon plasmas, which allows a comparison based on the mass of the ions, although no transition has been observed for these gases. As the radial or orbital behavior of the ions is essential to establish the validity of the different sheath theories, a theoretical analysis of such a transition not only as a function of the parameters Λ and β=T+/Te, T+ and Te being the positive ion and electron temperature, respectively, but also as a function of the ion mass is provided. This study allows us to recognize the importance of the mass of the ion as the parameter that explains the transition in helium plasmas. Motivated by these theoretical arguments, a novel set of measurements has been performed to study the relationship between the Λ and β parameters in the transition that demonstrate that the effect of the ion mean free path cannot be completely ignored and also that its influence on the ion current collected by the probe is less important than the effect of the ion temperature.

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Status and challenges in electrical diagnostics of processing plasmas

Cited by 25 publications

References 63 publications

Spatially Resolved Optoelectronic Properties of Al-Doped Zinc Oxide Thin Films Deposited by Radio-Frequency Magnetron Plasma Sputtering Without Substrate Heating

Spatially Resolved Optoelectronic Properties of Al-Doped Zinc Oxide Thin Films Deposited by Radio-Frequency Magnetron Plasma Sputtering Without Substrate Heating

A novel method of production of ethanol by carbon dioxide with steam

Influence of the Ion Mass in the Radial to Orbital Transition in Weakly Collisional Low-Pressure Plasmas Using Cylindrical Langmuir Probes

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