Statistical study of UV-laser-induced failure of fused silica

Génin, François Y.; Sheehan, Lynn Matthew; Yoshiyama, J. M.; Dijon, Jean; Garrec, Pierre

doi:10.1117/12.306993

Cited by 9 publications

(9 citation statements)

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“…The damage behavior was characterized by measurement of the laser-induceddamage threshold over a statistically representative population of sites and analysis of the damage morphologies. 26,38 To produce the masks, we deposited silicon nitride by low-stress chemical vapor deposition onto 3-in. ͑7.6-cm͒ silicon wafers.…”

Section: Sample Preparation and Laser Testing Proceduresmentioning

confidence: 99%

“…Statistical studies 26 conducted at hundreds of sites with a 1-mm-diameter beam determined that an uncontaminated sample was damaged first on the output surface at an average fluence of ϳ15 J͞cm 2 ͑and a standard deviation of ϳ1.5 J͞cm 2 ͒ when the surface was irradiated with a 355-nm, 3-ns pulse. The uncertainty on the fluence was Ϯ15%.…”

Section: Sample Preparation and Laser Testing Proceduresmentioning

confidence: 99%

“…[23][24][25] The significance of optical damage caused by contamination increases as optical designers require peak fluences that are close to the damage threshold of the most resistant polished optics ͑e.g., fused-silica lens-es͒ available today. 26 Because the probability of damage increases quickly with incident fluence near damage-threshold fluences, beam modulations can have destructive effects. One can minimize these modulations and consequent laser-induced damage caused by contamination particles by assembling and installing the optical components in a clean-room environment and by regular inspection and careful cleaning of the optics before operation.…”

Section: Introductionmentioning

confidence: 99%

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Rear-surface laser damage on 355-nm silica optics owing to Fresnel diffraction on front-surface contamination particles

et al. 2000

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Light intensity modulations caused by opaque obstacles (e.g., dust) on silica lenses in high-power lasers often enhance the potential for laser-induced damage. To study this effect, particles (10-250 mum) with various shapes were sputter deposited on the input surface and irradiated with a 3-ns laser beam at 355 nm. Although a clean silica surface damages at fluences above 15 J/cm(2), a surface contaminated with particles can damage below 11.5 J/cm(2). A pattern that conforms to the shape of the input surface particle is printed on the output surface. Repetitive illumination resulted in catastrophic drilling of the optic. The damage pattern correlated with an interference image of the particle before irradiation. The image shows that the incident beam undergoes phase (and amplitude) modulations after it passes around the particle. We modeled the experiments by calculating the light intensity distribution behind an obscuration by use of Fresnel diffraction theory. The comparison between calculated light intensity distribution and the output surface damage pattern showed good agreement. The model was then used to predict the increased damage vulnerability that results from intensity modulations as a function of particle size, shape, and lens thickness. The predictions provide the basis for optics cleanliness specifications on the National Ignition Facility to reduce the likelihood of optical damage.

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Section: Sample Preparation and Laser Testing Proceduresmentioning

confidence: 99%

Section: Sample Preparation and Laser Testing Proceduresmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Rear-surface laser damage on 355-nm silica optics owing to Fresnel diffraction on front-surface contamination particles

et al. 2000

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“…Many studies have also reported that polishing is a crucial process to laser damage. [3] During polishing, material is hydrated and removed from the sample surfaces. Simultaneously, the crack occurs due to blunt particles contacting the fused silica substrate in shear mode, and the hydrated material redeposits back onto the surface.…”

Section: Introductionmentioning

confidence: 99%

“…The development and construction of high‐power lasers continue to generate strong interest in the behavior of optical components under intense laser irradiation. The design of high‐power laser has created significant technological challenges in the area of 355 nm laser damage of fused silica because the designed fluence is close to the surface damage threshold of fused silica 1–4…”

Section: Introductionmentioning

confidence: 99%

Studies of laser damage morphology reveal subsurface feature in fused silica

Zhao

et al. 2010

Surface & Interface Analysis

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We present a detailed study of the morphology of 355 nm (6 ns) laser-induced damage in fused silica polished by CeO 2 solution. We see two distinct damage morphologies: the gray haze and the crater. The gray haze, consisting of a high density of pin-points, appears at the fluence higher than ∼10 J/cm 2 , and the crater forms at ∼≥22 J/cm 2 . The size and depth of the pin-points are much smaller than the crater. The difference in the two morphologies is attributed to the property of the absorber and its surrounding material in the redeposition layer, which is different from those in the subsurface damage layer. The damage growth characteristics of the two morphologies are measured, and the size of crater increases under successive shots, but the size of the gray haze remains constant. The growth of the crater is attributed to the existence of crack around the absorber, which is observed by SEM imaging. On the basis of the above analysis, the schematic diagram of subsurface feature is discussed.

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A universal theoretical model for thermal integration in materials during repetitive pulsed laser-based processing

Dao-cheng

Zhu

et al. 2018

Optik

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Statistical study of UV-laser-induced failure of fused silica

Cited by 9 publications

References 0 publications

Rear-surface laser damage on 355-nm silica optics owing to Fresnel diffraction on front-surface contamination particles

Rear-surface laser damage on 355-nm silica optics owing to Fresnel diffraction on front-surface contamination particles

Studies of laser damage morphology reveal subsurface feature in fused silica

A universal theoretical model for thermal integration in materials during repetitive pulsed laser-based processing

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