2011
DOI: 10.1364/oe.19.011916
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Statistical studies of photonic heterostructure nanocavities with an average Q factor of three million

Abstract: We have measured the quality (Q) factors and resonant wavelengths for 80 photonic crystal nanocavities with the same heterostructure. In this statistical evaluation, the Q factors varied according to a normal distribution centered at 3 million and ranging between 2.3 million and 3.9 million. The resonant wavelengths also fluctuated but with a standard deviation of only 0.33 nm. Such a high average Q factor and highly controlled resonant wavelength will be important for the development of advanced applications … Show more

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Cited by 105 publications
(89 citation statements)
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“…At a minimum, the further migration to photonic crystal structures should allow the relevant parameters associated with these paradigms to be pushed to their limits 26 and greatly facilitate scaling. For example, modern lithographic processing can create nanoscopic dielectric waveguides and resonators with optical quality factors Q410 6 and with efficient coupling among heterogeneous components [30][31][32][33][34][35] .…”
mentioning
confidence: 99%
“…At a minimum, the further migration to photonic crystal structures should allow the relevant parameters associated with these paradigms to be pushed to their limits 26 and greatly facilitate scaling. For example, modern lithographic processing can create nanoscopic dielectric waveguides and resonators with optical quality factors Q410 6 and with efficient coupling among heterogeneous components [30][31][32][33][34][35] .…”
mentioning
confidence: 99%
“…In particular, nanocavities fabricated on a silicon-on-insulator (SOI) wafer have achieved the highest experimental Q (Q exp ) exceeding several million [9][10][11][12][13][14]. A high Q/V ratio brings many benefits; therefore, silicon (Si) high-Q nanocavities are being widely studied in various fields.…”
Section: Introductionmentioning
confidence: 99%
“…However, unavoidable fabrication disorder in nanophotonic structures causes scattering which leads to frequency detuning, signal attenuation, and eventually localizes optical modes which ruins the transmission properties of the whole system 11,12 . Even state-of-the-art nanofabrication with random spatial variations of only ∆x = 1 nm can lead to resonance wavelength detunings of more than ∆λ = 1 nm 13,14 . Several methods have been proposed to tune nanocavities.…”
Section: Introductionmentioning
confidence: 99%