Statistical analysis in MRSM approach of computing and experimental results for integrated circuit technology

Kouleshoff, Alexander A.; Kuźmicz, Wiesław; Malyshev, V. S.; Nelayev, Vladislav; Stempitsky, V. R.

doi:10.1117/12.456287

SPIE Proceedings

2002

DOI: 10.1117/12.456287

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Statistical analysis in MRSM approach of computing and experimental results for integrated circuit technology

Alexander A. Kouleshoff

Wiesław Kuźmicz

V. S. Malyshev

et al.

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Statistical analysis in MRSM approach of computing and experimental results for integrated circuit technology

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