Static elimination performance of a corona ionizer in nitrogen-based electronegative gases

Nemoto, Daisuke; Sato, Naoyuki; He, Wanting; Ikehata, Takashi; Matsuo, Tetsuji; Okano, Keiichi

doi:10.1109/ias.2015.7356749

Cited by 1 publication

(2 citation statements)

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“…From (13), τ is obtained as 0.47 s. Therefore, the resistance R R1 in the first layer is obtained as 0.29 M from (12) because the capacitance C P 1 (= C N 1 ) was obtained as 3.27 μF from (6). In this section, we will determine the other resistances and capacitances in the equivalent circuit.…”

Section: Resistors For Ion Recombination the Positivementioning

confidence: 99%

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A simulation on neutralization performance of a corona discharge air ionizer by using an equivalent circuit

Okano

Ikehata

Suzuki³

et al. 2019

IEEJ Transactions Elec Engng

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Corona‐discharge air ionizers have been used to neutralize static electricity on electronic devices during manufacturing and/or inspection processes. The neutralization performance, that is, the neutralizing current density (JW) and the electric field (EW), in work area depends on the operating conditions. Methods for estimating the neutralization performance are required to check them without stopping the production lines. In this paper, we propose an estimation method using an equivalent circuit simulation called the Simulation Program with Integrated Circuit Emphasis (SPICE) for estimating the behavior of positive and negative ions in the generation, transportation, and work areas. In the simulation, the ion generation characteristics are simulated by diodes and resistors. The transportation and accumulation of the ions are simulated by resistors and capacitors, respectively. The annihilation of ions by recombination is simulated by a circuit composed of capacitors and resistors. The simulation results are in good agreement with the experimental results when the distance between the emitter of the air ionizer and the work area is varied. © 2019 Institute of Electrical Engineers of Japan. Published by John Wiley & Sons, Inc.

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Section: Resistors For Ion Recombination the Positivementioning

confidence: 99%

“…An air ionizer generates positive/negative ions to neutralize the undesired charges. The corona-discharge (CD) air ionizer is the most widely used ionizer in manufacturing and/or inspection processes of electronic devices [11][12][13][14].…”

Section: Introductionmentioning

confidence: 99%