Static characterization and pull-in voltage of a micro-switch under both electrostatic and piezoelectric excitations

Raeisifard, Hamed; Bahrami, Mohammad; Yousefi‐Koma, Aghil; Fard, Hafez Raeisi

doi:10.1016/j.euromechsol.2013.10.012

Cited by 32 publications

(19 citation statements)

References 16 publications

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“…In the paper by Wang and Cross (1999) there is an issue of a three-layer converter extended and solved, whereas in (Xiang and Shi, 2008) -a multi-layer one. The static characteristics of two-layer converters with different length of layers are shown in (Park and Moon, 2005;Raeisifard et al, 2014;Mieczkowski, 2016).…”

Section: Introductionmentioning

confidence: 99%

The constituent equations of piezoelectric cantilevered three-layer actuators with various external loads and geometry

Mieczkowski¹

2017

jtam

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This paper presents test results for deformation conditions of three-layer, piezoelectric cantilever converters subjected to various electrical and mechanical boundary conditions. A general solution has been developed based on implementation of piezoelectric triple segments (PTS) to the beam. A working mechanism and conditions for strain of the PTS segment have been determined. Basing on the general solution, for the cantilever actuator subjected to an external force (of single and dual PTS segments) and a uniform load (of single PTS segment), particular solutions have also been developed. Moreover, dimensionless frequencies of the oscillating motion for the analyzed converters have been determined. In the next step, the influence of such factors as length, quantity and position of PTS segments, their relative stiffness and unit weight on values of the obtained frequencies of vibration have been defined. The resulting analytical solutions have been compared with the developed FEM solution.

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Section: Introductionmentioning

confidence: 99%

The constituent equations of piezoelectric cantilevered three-layer actuators with various external loads and geometry

Mieczkowski¹

2017

jtam

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“…Furthermore, surface effect is also found to affect the pull-in instability of micro/nano-structres (Beni et al, 2012;Koochi et al, 2013). However, the main drawbacks of electrostatically actuated microsystems are high driving voltage and low reliability Raeisifard et al, 2014). Piezoelectric materials are getting increased attention since piezoelectric materials can generate very precise small motions and have a significant characteristic of high force transmission.…”

Section: Introductionmentioning

confidence: 99%

Pull-in voltage analysis of electrostatically actuated MEMS with piezoelectric layers: A size-dependent model

Xiao

Wang

Zhou

2015

Mechanics Research Communications

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“…In another work, a micro-switch as a microcantilever beam was investigated under combination of electrostatic and piezoelectric actuation by Raeisifard et al (2014). They considered nonlinearities due to inertia, curvature, electrostatic forces, and piezoelectric actuator.…”

Section: Introductionmentioning

confidence: 99%

Vibration behavior of a viscoelastic composite microbeam under simultaneous electrostatic and piezoelectric actuation

Yazdi

Jalali

2015

Mech Time-Depend Mater

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In this paper, the static and dynamic response of a clamped-clamped viscoelastic nanocomposite microbeam under combined electrostatic and piezoelectric actuations is analyzed. The equations of motion of the system are derived using the Euler-Bernoulli beam theory, Kelvin-Voigt model and Hamilton principle. The nonlinear model for the system is studied by considering stretching of the mid-plane, a DC electrostatic force, an AC harmonic force and a DC piezoelectric actuation. The static deflection and natural frequency of the system is extracted, and the influence of system parameters on the primary resonance behavior of the system is studied. It is shown that, based on various electrostatic and piezoelectric excitations, hardening or softening behavior is expected. So, one can tune these voltages such that this highly nonlinear system behaves linearly close to resonance frequency. Also it is shown that damping characteristics of the system with viscoelastic material not only depends on the damping coefficient of the system, but also on its other parameters.

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Static characterization and pull-in voltage of a micro-switch under both electrostatic and piezoelectric excitations

Cited by 32 publications

References 16 publications

The constituent equations of piezoelectric cantilevered three-layer actuators with various external loads and geometry

The constituent equations of piezoelectric cantilevered three-layer actuators with various external loads and geometry

Pull-in voltage analysis of electrostatically actuated MEMS with piezoelectric layers: A size-dependent model

Vibration behavior of a viscoelastic composite microbeam under simultaneous electrostatic and piezoelectric actuation

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