Static Characteristic of Self-compensated Hydrostatic Bearing

Abstract

The influence of design parameter on the static characteristic of a selfcompensated hydrostatic bearing was investigated in this article. This paper is obtaining the relationships of worktable displacement, load capacity, and static stiffness by using flow continuity equations of a self-compensated hydrostatic bearing. The results reveal that the appropriate range of design parameters for selfcompensated hydrostatic bearing can obtain the maximum stiffness. We provided and verified a new design parameter which is restriction island height ratio can improve static performance of self-compensated hydrostatic bearing. Further, we also discuss the influence of viscosity ratio for bearing.