Static and Dynamic Analysis of Carbon Nano Tube Cantilever for Nano Electro Mechanical Systems Based Applications

Abstract

<jats:p>The cantilever is the most basic form of the MEMS and NEMS-based applications. It may include actuators and sensors in multiple domains for the detection of deflections due to change in mass and charge from atomic to sub-atomic levels. The main constraints in the real-time environment for sensing applications are good sensitivity and selectivity along with good response time and wide dynamic range. CNTs (Carbon Nano Tubes) possess excellent electrical characteristics with good mechanical strength like elasticity, flexibility, tensile strength and good thermal conductivity. These properties make use of CNTs in NEMS that gives rise to good sensing platforms. In this paper we propose, design and analysis of CNT based Cantilever structure using FEM to determine the change in deflection due to varying load under static analysis. Similarly from dynamic analysis change in resonance frequency for change in thickness of Cantilever is performed. From the experimental results using COMSOL simulation, it is observed that the CNT based Cantilever deflection sensitivity is 9.85 x 10<jats:sup>-8</jats:sup> m under maximum stress of 6.71 x 10<jats:sup>-9</jats:sup> N/m<jats:sup>2</jats:sup>. From the dynamic analysis, resonant frequency occurs at 1.8 x 10<jats:sup>7</jats:sup> Hz for 10 nm thickness and for 50 nm is 7.5 x 10<jats:sup>7</jats:sup> Hz respectively.</jats:p>

Mathematical Modelling and Analysis of Temperature Effects in NEMS Based Bi-Metallic Cantilever for Molecular Biosensing Applications

“…The equation ( 6) can represent changes in curvature with temperature in a bimetallic cantilever with non-zero deformation. The curvature derived in equation ( 6) is different from the below equation of previous publications (Chu, Mehregany and Mullen, 1993b), (Katta et al, 2020), (Chen and Feng, 2011b), (Chun-Hao Chen et al, 2009) and is being used in the field of nanomechanics…”

“…Capacitance fluctuations caused by the deflection of bimetallic cantilevers loaded by linear or nonlinear electrostatic forces and thermal bending forces are used in sensors and actuators (Vineetha et al, 2018a), (Hegner and Arntz, 2003). The static behaviour of nano cantilever beams was also investigated (Katta et al, 2020).…”

Sensitivity Analysis of NEMS Cantilever to Detect Volatile Organic Compounds Using Finite Element Method

“…To analyze the geometrical characteristics of basic cantilever structure, consider the general force balance equation of spring-mass system (Katta et al, 2020).…”

“…Where 𝜔 is the vibrational as resonant frequency According to the above Stoney's equation (Katta et al, 2020) deflection of cantilever beam is proportional to stress applied on its surface under the assumption of small and fixed geometrical parameters length and thickness.…”