A microwave (2.45 GHz) oxygen discharge (3 hPa, 150 W, 50 mL.min −1 ) is studied by optical emission spectroscopy of O( 5 P) (line 777.4 nm) and of the atmospheric system of O2(head-line 759.4 nm). Calibration of the spectral response of the optical setup is used to determine the concentrations of O( 5 P) and O2(b). The concentration of the O( 5 P) atoms is in the range 10 8 -10 9 cm −3 and the concentration of the O2(b) molecules is in the range 1014 -2×10 14 cm −3 along the discharge tube. An attempt is made to simulate the experimental results by using coupling the Boltzmann equation, homogeneous energy transfer V-V and V-T, heterogeneous reactions on the walls (energy transfer and recombination of atoms) and a kinetic scheme (electronic transfer and chemical reactions). The Boltzmann equation includes momentum transfer, inelastic and superelastic processes and e-e collisions. V-V and V-T transfer equations are obtained from the SSH theory and the kinetic scheme includes 65 reactions with 17 species [electrons e, ions O − and O2 − , fundamental electronic neutral species O( 3 P), O2, O2 (X,v)
, O3 and excited neutral species O2(a), O2(b), O2(A), O(