2010
DOI: 10.2116/bunsekikagaku.59.349
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State-of-the-Art on Ultra-Trace Analysis of Ultrapure Water

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“…And therefore the impurity in the suspension was neglected in the study. The common impurity in ultrapure water includes total oxidizable carbon materials (TOC, about 65% of the total impurity mass), total silica (30%), and Boron (less than 5%) according to the industrial requirements for ultrapure water (Yoshida et al 2010). TOC covers various species including organic and halogenic compounds, which are difficult to quantify separately.…”
Section: Uncertainty Of Predicted Massmentioning
confidence: 99%
“…And therefore the impurity in the suspension was neglected in the study. The common impurity in ultrapure water includes total oxidizable carbon materials (TOC, about 65% of the total impurity mass), total silica (30%), and Boron (less than 5%) according to the industrial requirements for ultrapure water (Yoshida et al 2010). TOC covers various species including organic and halogenic compounds, which are difficult to quantify separately.…”
Section: Uncertainty Of Predicted Massmentioning
confidence: 99%