“…With 135 V bias, V dc /V r = 0.784, and CBC, (13) yields X P +X P = 0.1707t ge for this bias level. The static transduction force, F R , is found as 5.12 × 10 −4 Nt under same conditions, using (17). The center deflections of the front and back plates are determined as 90 and 38 nm, respectively, using (7) and (8), which matches to the FEA results reported in [8,Fig.…”