Stainless steel capacitive pressure sensor for high pressure and corrosive media applications

Ho, Shih-Shian; Rajgopal, Srihari; Mehregany, Mehran

doi:10.1109/memsys.2010.5442323

Cited by 9 publications

(1 citation statement)

References 8 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…In 2010, we demonstrated hostile-environment capability for the first-generation SS capacitive pressure sensor [7]. In this paper, we present improved performance from the secondgeneration SS capacitive pressure sensor.…”

Section: Introductionmentioning

confidence: 90%

Stainless steel capacitive pressure sensor for hostile environments: Sample-to-sample variability and reliability characterization

Rajgopal

Mehregany

2011

2011 IEEE SENSORS Proceedings

Self Cite

View full text Add to dashboard Cite

Assembly-type stainless steel (SS) pressure sensors are promising low-cost devices for high-pressure, corrosivemedia applications. This report studies media compatibility, sample-to-sample variance, and reliability testing, as a step toward validating commercial viability of the technology. The sensor is realized from four main elements: a SS diaphragm die, a SS press plate, a tungsten carbide (WC) backing plate and a commercial off-the-shelf (COTS) SS vacuum coupling radiation (VCR) pipe fitting that also serves as the package. Media compatibility tests with nitrogen gas, deionized (DI) water, 45% wt. potassium hydroxide (KOH) solution, and 10% wt. sodium chloride (NaCl) solution at pressures up to 1,000 psi showed a repeatability error as low as 0.7% full-scale (FS). Sample-tosample variance for three dimensionally identical packaged sensors was determined to be 9% FS. The reliability tests have been encouraging, with a single packaged sensor tested for over 1 million cycles to date in nitrogen gas with a repeatability error of 6% FS.I.

show abstract

Section: Introductionmentioning

confidence: 90%